4H-N/6H-N SiC Wafer Reasearch 4H-N/6H-N Wax-soo-saarka Dib-u-Celinta Wax-soo-saarka Dummy fasalka 150mm Silicon carbide substrate

4H-N/6H-N SiC Wafer Reasearch wax soo saarka heerka dhimman ee Dia150mm Substrate-ka Silicon carbide Sawirka

Sharaxaad Gaaban:

Waxaan ku siin karnaa heerkul sare superconducting substrate film khafiif ah, filimada dhuuban magnetic iyo substrate film ferroelectric khafiif ah, semiconductor crystal, crystal indhaha, qalabka crystal laser, isla mar ahaantaana bixiyaan hanuuninta, goynta crystal, shiidi, polishing iyo adeegyada kale ee processing. Substrate-yadayada SiC waxay ka yimaadaan Warshada Tankeblue ee Shiinaha.

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6 inch dhexroor silikon carbide (SiC) qeexida substrate

Darajo	Eber MPD	Wax soo saar	Darajada Cilmi-baarista	Dummy Fasalka
Dhexroorka	150.0mm ± 0.25mm
Dhumucda	4H-N	350um±25um
	4H-SI	500um±25um
Hanuuninta Wafer	Dhinaca dhidibka: <0001>±0.5° ee 4H-SI dhidibka ka baxsan : 4.0° dhanka <1120>±0.5° ee 4H-N
Guriga Hoose	{10-10}±5.0°
Dhererka Guriga aasaasiga ah	47.5mm ± 2.5mm
Ka saarida gees	3mm
TTV/Bow/Warp	≤15um/≤40um/≤60um
Cufnaanta Dheef-yar	≤1cm-2	≤5cm-2	≤15cm-2	≤50cm-2
Iska caabin 4H-N 4H-SI	0.015 ~ 0.028Ω!cm
	≥1E5Ω!cm
Qalafsanaan	Polish Ra ≤1nm CMP Ra≤0.5nm
# Dildilaaca iftiinka xoogga badan	Midna		1 waa la ogol yahay,≤2mm	Dhererka isku dhafan ≤10mm, dhererka hal≤2mm
* Taarikada hex ee iftiinka xoogga sare	Aagga isugeynta ≤1%		Aagga isugeynta ≤ 2%	Aagga isugeynta ≤ 5%
*Meelaha polytype by iftiinka xoogga badan	Midna		Aagga isugeynta ≤ 2%	Aagga isugeynta ≤ 5%
*&Xaqyo iftiinka xoogga badan	3 xoqin ilaa 1 x dhexroorka wafer dhererka wadarta		5 xagtin ilaa 1 x dhexroorka wafer dhererka isugaynta	5 xoqid ilaa 1 x dhexroorka wafer dhererka wadarta
Chip Edge	Midna		3 waa la oggol yahay, ≤0.5mm midkiiba	5 waa la oggol yahay, ≤1mm midkiiba
Wasakhaynta iftiinka xoogga badan	Midna

Iibka & Adeegga Macmiilka

Alaabta Iibka

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Adeegga

Waxaan ku faannaa in aan haysano shaqaale injineer iib ah oo leh khibrad 5 sano ka badan warshadaha semiconductor. Waxaa loo tababbaray inay ka jawaabaan su'aalaha farsamada iyo sidoo kale inay bixiyaan xigashooyin waqtiyeysan baahiyahaaga.

waanu kula garab joognaa wakhti kasta oo aad dhibaato qabto, oo ku xalliso 10 saacadood gudahood.