4H-N/6H-N SiC Wafer Reasearch wax soo saarka heerka dummy Dia150mm Silicon carbide substrate
Qeexitaanka substrate-ka silicon carbide (SiC) dhexroorka 6 inji
| Fasal | Eber MPD | Soo saarista | Darajada Cilmi-baarista | Fasalka Madow |
| Dhexroorka | 150.0mm±0.25mm | |||
| Dhumucda | 4H-N | 350um±25um | ||
| 4H-SI | 500um±25um | |||
| Jihaynta Wafer-ka | Dhidibka: <0001>±0.5° ee 4H-SI | |||
| Aqal Hoose | {10-10}±5.0° | |||
| Dhererka Fidsan ee Aasaasiga ah | 47.5mm ± 2.5mm | |||
| Ka saarista geeska | 3mm | |||
| TTV/Qaanso/Warp | ≤15um/≤40um/≤60um | |||
| Cufnaanta Tuubooyinka Yaryar | ≤1cm-2 | ≤5cm-2 | ≤15cm-2 | ≤50cm-2 |
| Iska caabinta 4H-N 4H-SI | 0.015 ~0.028Ω!cm | |||
| ≥1E5Ω!cm | ||||
| Qalafsanaan | Boolish Ra ≤1nm CMP Ra≤0.5nm | |||
| #Dillaacyo ay sameeyeen iftiin xooggan | Midna ma jiro | 1 la oggol yahay, ≤2mm | Dhererka wadarta ≤10mm, dherer hal ah ≤2mm | |
| *Taarikada Hex iyadoo la adeegsanayo iftiin xooggan oo sare | Aagga wadarta ah ≤1% | Aagga wadarta ≤ 2% | Aagga wadarta ≤ 5% | |
| * Meelaha polytype-ka ah iyadoo la adeegsanayo iftiin xooggan | Midna ma jiro | Aagga wadarta ≤ 2% | Aagga wadarta ≤ 5% | |
| *&Xumaan iyadoo la adeegsanayo iftiin xooggan | 3 xoqid ilaa 1 x dhexroorka wafer dhererka wadarta ah | 5 xoqid ilaa 1 x dhexroorka wafer dhererka wadarta ah | 5 xoqan ilaa 1 x dhexroorka wafer dhererka wadarta ah | |
| Jabka geeska | Midna ma jiro | 3 la oggol yahay, ≤0.5mm midkiiba | 5 la oggol yahay, ≤1mm midkiiba | |
| Wasakheynta iftiinka xoogga badan | Midna ma jiro
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Iibka & Adeegga Macaamiisha
Iibsashada Agabka
Waaxda iibsiga agabka ayaa mas'uul ka ah inay ururiso dhammaan agabka ceeriin ee loo baahan yahay si loo soo saaro badeecadaada. Raad-raac dhammaystiran oo dhammaan agabka iyo agabka, oo ay ku jiraan falanqaynta kiimikada iyo jireed, ayaa had iyo jeer diyaar ah.
Tayada
Inta lagu jiro iyo ka dib soo saarista ama farsamaynta alaabtaada, waaxda xakamaynta tayada ayaa ku lug leh hubinta in dhammaan agabka iyo dulqaadku ay buuxiyaan ama ka badan yihiin shuruudahaaga.
Adeegga
Waxaan ku faannaa inaan haysanno shaqaale injineerinka iibka ah oo khibrad ka badan 5 sano u leh warshadaha semiconductor-ka. Waxaa loo tababaray inay ka jawaabaan su'aalaha farsamada iyo sidoo kale inay bixiyaan qiimeyn waqtigeeda ku habboon baahiyahaaga.
Waxaan kula garab taaganahay wakhti kasta oo aad dhibaato la kulanto, waxaanan ku xallin doonnaa 10 saacadood gudahood.



