3 inch Nadiif Sareedo (Lama La'aan) Silicon Carbide Wafers Semi-Insulating Sic Substrates (HPSl)
Guryaha
1. Qalabka Jirka iyo Dhismaha
●Qalab: Nadiif Sarreeysa (Lama Laaban) Silicon Carbide (SiC)
● Dhexroorka: 3 inji (76.2 mm)
● Dhumucdiisuna: 0.33-0.5 mm, la beddeli karo oo ku salaysan shuruudaha codsiga.
● Qaab dhismeedka crystal: 4H-SiC polytype oo leh shabag lix geesood ah, oo loo yaqaan dhaqdhaqaaqa elektaroonigga sare iyo xasilloonida kulaylka.
●Hanuuninta:
oStandard: [0001] (C-plane), oo ku habboon codsiyo kala duwan.
o Ikhtiyaar ah: dhidibka ka baxsan (4° ama 8° janjeero) ee kor loogu qaadayo koritaanka epitaxial ee lakabyada qalabka.
●Balaash: Isu geynta dhumucda kala duwanaanshaha (TTV) ●Tayada dusha sare:
La qurxiyey cufnaanta cillad-hoose (<10/cm² cufnaanta micropipe). 2. Guryaha Korontada ● Iska caabin:>109^99 Ω·cm, oo lagu ilaaliyo ciribtirka dopants ulakac ah.
●Xoojinta Dielectric: Adkeysiga tamarta sare leh khasaaraha ugu yar ee dielectric, oo ku habboon codsiyada awoodda sare leh.
●Waxqabadka kulaylka: 3.5-4.9 W/cm · K, awood u yeelashada kulaylka wax ku ool ah ee qalabka waxqabadka sare.
3. Guryaha kulaylka iyo Makaanikada
●Wide Bandgap: 3.26 eV, hawlgalka taageeraya hoos danab sare, heerkulka sare, iyo xaaladaha shucaaca sare.
● Adag: Mohs miisaanka 9, hubinta adkeysiga ka dhanka ah xirashada makaanikada inta lagu jiro farsamaynta.
●Isku-balaadhinta kulaylka: 4.2×10−6/K4.2 \ times 10^{-6}/\text{K}4.2×10−6/K, hubinta xasiloonida cabbirka hoos yimaada kala duwanaanta heerkulka.
Halbeegga | Heerka Wax-soo-saarka | Darajada Cilmi-baarista | Dummy Fasalka | Unug |
Darajo | Heerka Wax-soo-saarka | Darajada Cilmi-baarista | Dummy Fasalka | |
Dhexroorka | 76.2 ± 0.5 | 76.2 ± 0.5 | 76.2 ± 0.5 | mm |
Dhumucda | 500 ± 25 | 500 ± 25 | 500 ± 25 | µm |
Hanuuninta Wafer | dhidibka: <0001> ± 0.5° | dhidibka: <0001> ± 2.0° | dhidibka: <0001> ± 2.0° | shahaado |
Cufnaanta Micropipe (MPD) | ≤ 1 | ≤ 5 | ≤ 10 | cm-2^-2-2 |
Iska caabin koronto | ≥ 1E10 | ≥ 1E5 | ≥ 1E5 | Ω·cm |
Dopant | Ka laabasho | Ka laabasho | Ka laabasho | |
Hanuuninta Flat Primary | {1-100} ± 5.0° | {1-100} ± 5.0° | {1-100} ± 5.0° | shahaado |
Dhererka Guriga aasaasiga ah | 32.5 ± 3.0 | 32.5 ± 3.0 | 32.5 ± 3.0 | mm |
Dhererka Guriga Sare | 18.0 ± 2.0 | 18.0 ± 2.0 | 18.0 ± 2.0 | mm |
Hanuuninta Guriga Sare | 90° CW dabaqa hoose ± 5.0° | 90° CW dabaqa hoose ± 5.0° | 90° CW dabaqa hoose ± 5.0° | shahaado |
Ka saarida gees | 3 | 3 | 3 | mm |
LTV/TTV/Bow/Warp | 3 / 10 / ± 30 / 40 | 3 / 10 / ± 30 / 40 | 5 / 15 / ± 40 / 45 | µm |
Dusha sare ee Roughness | Si-wejiga: CMP, C-wejiga: La sifayn | Si-wejiga: CMP, C-wejiga: La sifayn | Si-wejiga: CMP, C-wejiga: La sifayn | |
Dildilaaca (Iftiinka xoogga badan) | Midna | Midna | Midna | |
Hex Plates (Iftiinka Xoogga Sare) | Midna | Midna | Aagga isugeynta 10% | % |
Aagaga Noocyo badan (Iftiinka Xoogga Sare) | Aagga isugeynta 5% | Aagga isugeynta 20% | Aagga isugeynta 30% | % |
Xaqashada (Iftiinka Xoogga Sare) | ≤ 5 xagtin, dhererka isugaynta ≤ 150 | ≤ 10 xoqid, dhererka isugeynta ≤ 200 | ≤ 10 xoqid, dhererka isugeynta ≤ 200 | mm |
Chipping Edge | Midna ≥ 0.5 mm ballac/ qoto dheer | 2 la ogol yahay ≤ 1 mm ballac/qoto dheer | 5 la ogol yahay ≤ 5 mm ballac/qoto dheer | mm |
Wasakhaynta Dusha sare | Midna | Midna | Midna |
Codsiyada
1. Korontada Elektarooniga ah
Xajmiga ballaaran iyo kuleylka sare ee HPSI SiC substrates ayaa ka dhigaya kuwa ku habboon aaladaha korantada ee ku shaqeeya xaaladaha daran, sida:
●Aaladaha Voltage Sare: Oo ay ku jiraan MOSFETs, IGBTs, iyo Schottky Barrier Diodes (SBDs) si loogu badalo awood hufan.
●Nidaamka tamarta dib loo cusboonaysiin karo: sida rogrogayaasha qoraxda iyo kontaroolayaasha marawaxadaha dabaysha.
●Gawaadhida Korontada (EVs): Waxaa loo isticmaalaa rogo-rogayaasha, dabaylaha, iyo nidaamyada tareennada korontada si loo hagaajiyo waxtarka loona yareeyo cabbirka.
2. Codsiyada RF iyo Microwave
Iska caabbinta sare iyo lumista tamarta yar ee waferrada HPSI waxay lama huraan u yihiin soo noqnoqoshada raadiyaha (RF) iyo nidaamyada microwave-ka, oo ay ku jiraan:
●Kaabayaasha isgaarsiinta: Saldhigyada shabakadaha 5G iyo isgaarsiinta satalaytka.
● Hawada iyo Difaaca: Nidaamyada radar, anteenooyinka qaabaysan, iyo qaybaha avionics.
3. Optoelectronics
Daah-furnaanta iyo bandheynta ballaaran ee 4H-SiC waxay awood u siineysaa isticmaalkeeda aaladaha optoelectronic, sida:
● Sawir-qaadayaasha UV: La socodka deegaanka iyo ogaanshaha caafimaadka.
● LEDs-Awood sare leh: Taageerida nidaamyada nalalka adag ee gobolka.
●Laser Diodes: Loogu talagalay codsiyada warshadaha iyo caafimaadka.
4. Cilmi-baarista iyo Horumarinta
Substrate-ka HPSI SiC ayaa si weyn loogu isticmaalaa shaybaarada tacliinta iyo warshadaha ee R&D si loo sahamiyo agabka horumarsan iyo samaynta aaladaha, oo ay ku jiraan:
●Kobaca lakabka Epitaxial: Daraasado ku saabsan dhimista cilladaha iyo hagaajinta lakabka.
●Daraasaadka Dhaqdhaqaaqa Qaade: Baaritaanka gaadiidka elektaroonigga ah iyo daloolka ee alaabta nadiifka ah.
●Prototyping: Horumarinta hore ee aaladaha cusub iyo wareegyada.
Faa'iidooyinka
Tayada Sare
Nadiifinta sare iyo cufnaanta cilladda hoose waxay siisaa goob lagu kalsoonaan karo oo loogu talagalay codsiyada horumarsan.
Deganaanshaha kulaylka:
Guryaha kala-baxa kulaylka ee aadka u fiican ayaa u oggolaanaya aaladaha inay si hufan ugu shaqeeyaan xaaladaha heerkulka sare iyo awoodda.
Waafaqid Ballaaran:
Jihaynta la heli karo iyo ikhtiyaarrada dhumucda gaarka ah waxay xaqiijinayaan la qabsiga shuruudaha qalabka kala duwan.
Waarta:
Qalafsanaanta gaarka ah iyo xasilloonida qaabdhismeedku waxay yareeyaan xidhashada iyo qallooca inta lagu jiro habaynta iyo hawlgalka.
Kala duwanaansho:
Ku habboon warshado kala duwan, laga bilaabo tamarta la cusboonaysiin karo ilaa hawada hawada iyo isgaarsiinta.
Gabagabo
3-inji Nadiifinta Sare ee Semi-Insulating Silicon Carbide wafer waxay ka dhigan tahay meesha ugu sarreysa tignoolajiyada substrate ee awooda sare, soo noqnoqoshada sare, iyo aaladaha indhaha. Isku dhafka kuleylka aadka u fiican, korantada, iyo qalabka farsamada waxay hubisaa waxqabadka la isku halayn karo ee jawiga adag. Laga soo bilaabo korantada elektiroonigga ah iyo nidaamyada RF ilaa optoelectronics iyo R&D horumarsan, kuwan HPSI substrates waxay bixiyaan aasaaska hal-abuurka berrito.
Wixii macluumaad dheeraad ah ama si aad u dalbato, fadlan nala soo xiriir. Kooxdayada farsamada ayaa diyaar u ah inay ku siiyaan hagitaan iyo xulashooyin habeyneed oo ku habboon baahiyahaaga.
Jaantus faahfaahsan



