3 inji Nadiifnimo Sare (Lama isticmaalin) Wafers Silicon Carbide Substrates nus-insulating Sic Substrates (HPSl)
Guryaha
1. Sifooyinka Jireed iyo Qaab-dhismeedka
● Nooca Qalabka: Nadiifin Sare (Lama isticmaalin) Silicon Carbide (SiC)
● Dhexroorka: 3 inji (76.2 mm)
●Dhumucda: 0.33-0.5 mm, oo la beddeli karo iyadoo lagu saleynayo shuruudaha codsiga.
● Qaab-dhismeedka Kiristaalka: Nooc polytype ah oo 4H-SiC ah oo leh shabag lix-geesood ah, oo loo yaqaan dhaqdhaqaaqa elektarooniga sare iyo xasilloonida kulaylka.
● Jihaynta:
oStandard: [0001] (C-plane), oo ku habboon codsiyo kala duwan.
o Ikhtiyaar: dhidibka ka baxsan (4° ama 8° janjeedh) si kor loogu qaado koritaanka epitaxial ee lakabka qalabka.
● Fidsanaan: Kala duwanaanshaha dhumucda guud (TTV) ● Tayada Dusha sare:
o Lagu dhalaaliyay cufnaanta cilladaha hooseeya (<10/cm² cufnaanta dhuumaha yar). 2. Astaamaha Korontada ● Iska caabin: >109^99 Ω·cm, oo lagu ilaaliyo ka saarista daawada si ula kac ah loo qaato.
● Xoogga Dielectric: Adkeysiga danab sare leh oo leh khasaaro yar oo dielectric ah, oo ku habboon codsiyada awoodda sare leh.
●Qaadashada Kulaylka: 3.5-4.9 W/cm·K, taasoo suurtogalinaysa kala-baxa kulaylka ee wax ku oolka ah ee aaladaha waxqabadka sare leh.
3. Sifooyinka Kuleylka iyo Farsamada
●Ballaca Ballaca: 3.26 eV, oo ah hawlgal taageeraya danab sare, heerkul sare, iyo xaalado shucaac sare.
●Adkaanta: Mohs 9, oo hubinaysa adkeysi ka dhan ah xirashada farsamada inta lagu jiro farsamaynta.
●Isku-darka Ballaarinta Kulaylka: 4.2×10−6/K4.2 \times 10^{-6}/\text{K}4.2×10−6/K, taasoo hubinaysa xasilloonida cabbirka marka heerkulku isbeddelo.
| Halbeegga | Heerka Wax Soo Saarka | Darajada Cilmi-baarista | Fasalka Madow | Cutubka |
| Fasal | Heerka Wax Soo Saarka | Darajada Cilmi-baarista | Fasalka Madow | |
| Dhexroorka | 76.2 ± 0.5 | 76.2 ± 0.5 | 76.2 ± 0.5 | mm |
| Dhumucda | 500 ± 25 | 500 ± 25 | 500 ± 25 | µm |
| Jihaynta Wafer-ka | Dhidibka dul saaran: <0001> ± 0.5° | Dhidibka: <0001> ± 2.0° | Dhidibka: <0001> ± 2.0° | shahaado |
| Cufnaanta Tuubooyinka Yaryar (MPD) | ≤ 1 | ≤ 5 | ≤ 10 | cm−2^-2−2 |
| Iska caabinta Korontada | ≥ 1E10 | ≥ 1E5 | ≥ 1E5 | Ω·cm |
| Dopant | Lama isticmaalin | Lama isticmaalin | Lama isticmaalin | |
| Jihada Fidsan ee Aasaasiga ah | {1-100} ± 5.0° | {1-100} ± 5.0° | {1-100} ± 5.0° | shahaado |
| Dhererka Fidsan ee Aasaasiga ah | 32.5 ± 3.0 | 32.5 ± 3.0 | 32.5 ± 3.0 | mm |
| Dhererka Fidsan ee Labaad | 18.0 ± 2.0 | 18.0 ± 2.0 | 18.0 ± 2.0 | mm |
| Jihada Fidsan ee Labaad | 90° CW laga bilaabo guriga koowaad ± 5.0° | 90° CW laga bilaabo guriga koowaad ± 5.0° | 90° CW laga bilaabo guriga koowaad ± 5.0° | shahaado |
| Ka-saarista Cidhifka | 3 | 3 | 3 | mm |
| LTV/TTV/Qaanso/Warp | 3 / 10 / ±30 / 40 | 3 / 10 / ±30 / 40 | 5 / 15 / ±40 / 45 | µm |
| Qalafsanaanta Dusha sare | Si-wejiga: CMP, C-wejiga: La safeeyey | Si-wejiga: CMP, C-wejiga: La safeeyey | Si-wejiga: CMP, C-wejiga: La safeeyey | |
| Dildilaacyo (Iftiinka Xoogga Badan) | Midna ma jiro | Midna ma jiro | Midna ma jiro | |
| Saxannada Hex (Iftiinka Xoogga Sare leh) | Midna ma jiro | Midna ma jiro | Aagga guud 10% | % |
| Meelaha Nooca Badan (Iftiinka Xoogga Badan) | Aagga wadarta 5% | Aagga guud 20% | Baaxadda guud 30% | % |
| Xoqitaan (Iftiinka Xoogga Sare leh) | ≤ 5 xoqan, dhererka wadarta ≤ 150 | ≤ 10 xoqan, dhererka wadarta ≤ 200 | ≤ 10 xoqan, dhererka wadarta ≤ 200 | mm |
| Jabinta geeska | Midna ≥ 0.5 mm ballac/qoto dheer | 2 la oggol yahay ≤ 1 mm ballac/qoto dheer | 5 la oggol yahay ≤ 5 mm ballac/qoto dheer | mm |
| Wasakhowga Dusha Sare | Midna ma jiro | Midna ma jiro | Midna ma jiro |
Codsiyada
1. Elektarooniga Korontada
Balaca ballaaran iyo hufnaanta kulaylka sare ee substrate-ka HPSI SiC ayaa ka dhigaya kuwo ku habboon aaladaha korontada ee ku shaqeeya xaaladaha ba'an, sida:
●Aaladaha Danab-sarreeya: Waxaa ku jira MOSFET-yada, IGBT-yada, iyo Schottky Barrier Diodes (SBDs) si loogu beddelo koronto hufan.
● Nidaamyada Tamarta La Cusboonaysiin Karo: Sida kuwa tamarta dhaliya ee qoraxda ku shaqeeya iyo kuwa xakameeya dabaysha.
●Gaadiidka Korontada (EVs): Waxaa loo isticmaalaa inverters-ka, chargers-ka, iyo nidaamyada powertrain-ka si loo hagaajiyo hufnaanta loona yareeyo cabbirka.
2. Codsiyada RF iyo Microwave-ka
Iska caabinta sare iyo khasaaraha dielectric ee hooseeya ee wafers-ka HPSI ayaa lagama maarmaan u ah nidaamyada soo noqnoqda ee raadiyaha (RF) iyo microwave-ka, oo ay ku jiraan:
●Kaabayaasha Isgaarsiinta: Saldhigyada saldhigyada shabakadaha 5G iyo isgaarsiinta dayax-gacmeedka.
●Hawada Sare iyo Difaaca: Nidaamyada radar-ka, anteenooyinka safka hore leh, iyo qaybaha hawo-mareenka.
3. Elektaroonikada Optoelectronics
Hufnaanta iyo farqiga ballaaran ee 4H-SiC waxay suurtogal ka dhigaysaa in loo isticmaalo aaladaha optoelectronic, sida:
●Sawir-qaadayaasha UV: Loogu talagalay la socodka deegaanka iyo baaritaanka caafimaadka.
●Nalalka Iftiinka ee Awoodda Sare leh: Taageeraya nidaamyada nalalka adag.
●Laser Diodes: Loogu talagalay codsiyada warshadaha iyo caafimaadka.
4. Cilmi-baaris iyo Horumarin
Substrates-ka HPSI SiC waxaa si weyn loogu isticmaalaa shaybaarrada cilmi-baarista iyo horumarinta warshadaha si loo sahamiyo sifooyinka agabka casriga ah iyo sameynta qalabka, oo ay ku jiraan:
●Kobaca Lakabka Epitaxial: Daraasado ku saabsan yaraynta cilladaha iyo hagaajinta lakabka.
●Daraasaddaha Dhaqdhaqaaqa Qaadaha: Baaritaanka gaadiidka elektarooniga ah iyo godadka ee walxaha saafiga ah ee aadka u fiican.
● Samaynta qaab-dhismeedka: Horumarka bilowga ah ee aaladaha cusub iyo wareegyada.
Faa'iidooyinka
Tayada Sare:
Nadiifnimo sare iyo cufnaanta cilladaha oo hooseeya waxay bixiyaan goob lagu kalsoonaan karo oo loogu talagalay codsiyada horumarsan.
Xasiloonida Kulaylka:
Sifooyinka kulaylka ee aadka u fiican waxay u oggolaanayaan aaladaha inay si hufan u shaqeeyaan xaaladaha awoodda sare iyo heerkulka.
Iswaafajin Ballaaran:
Jihooyinka la heli karo iyo xulashooyinka dhumucda gaarka ah waxay hubinayaan in la waafajin karo shuruudaha qalabka kala duwan.
Waarta:
Adkaanta gaarka ah iyo xasilloonida qaab-dhismeedka ayaa yareysa xirashada iyo isbeddelka inta lagu jiro habaynta iyo hawlgalka.
Kala duwanaansho:
Ku habboon warshado kala duwan, laga bilaabo tamarta la cusboonaysiin karo ilaa hawada sare iyo isgaarsiinta.
Gunaanad
Wafer-ka Silicon Carbide-ka ee 3-inji ah ee High Purity Semi-Insulating wuxuu matalaa heerka ugu sarreeya ee tiknoolajiyada substrate-ka ee aaladaha awoodda sare leh, kuwa soo noqnoqda sare leh, iyo kuwa optoelectronic-ka. Isku-darka sifooyinka kulaylka, korontada, iyo farsamada ee aadka u fiican waxay hubinayaan waxqabad la isku halleyn karo oo ka jira jawi adag. Laga bilaabo qalabka elektaroonigga korontada iyo nidaamyada RF ilaa qalabka optoelectronic iyo cilmi-baarista iyo horumarinta horumarsan, qalabkan HPSI wuxuu bixiyaa aasaaska hal-abuurka berri.
Wixii macluumaad dheeraad ah ama aad dalbanayso, fadlan nala soo xiriir. Kooxdayada farsamada ayaa diyaar u ah inay bixiyaan hagitaan iyo ikhtiyaarro habayn ah oo loogu talagalay baahiyahaaga.
Jaantus Faahfaahsan















