3 inch Nadiif Sareedo (Lama Laaban) Silicon Carbide Wafers Semi-Insulating Sic Substrates (HPSl)
Guryaha
1. Qalabka Jirka iyo Dhismaha
●Qalab: Nadiif Sarreeysa (Lama Laaban) Silicon Carbide (SiC)
● Dhexroorka: 3 inji (76.2 mm)
● Dhumucdiisuna: 0.33-0.5 mm, la beddeli karo oo ku salaysan shuruudaha codsiga.
● Qaab dhismeedka crystal: 4H-SiC polytype oo leh shabag lix geesood ah, oo loo yaqaan dhaqdhaqaaqa elektaroonigga sare iyo xasilloonida kulaylka.
●Hanuuninta:
oStandard: [0001] (C-plane), oo ku habboon codsiyo kala duwan.
Ikhtiyaar ah: dhidibka ka baxsan (4° ama 8° janjeero) ee kor loogu qaadayo koritaanka epitaxial ee lakabyada qalabka.
●Balaash: Isu geynta dhumucda kala duwanaanshaha (TTV) ●Tayada dusha sare:
La qurxiyey cufnaanta cillad-hoose (<10/cm² cufnaanta micropipe). 2. Guryaha Korontada ● Iska caabin:>109^99 Ω·cm, oo lagu ilaaliyo ciribtirka dopants ulakac ah.
●Xoojinta Dielectric: Adkeysiga tamarta sare leh khasaaraha ugu yar ee dielectric, oo ku habboon codsiyada awoodda sare leh.
●Waxqabadka kulaylka: 3.5-4.9 W/cm · K, awood u yeelashada kulaylka wax ku ool ah ee qalabka waxqabadka sare.
3. Guryaha kulaylka iyo Makaanikada
●Wide Bandgap: 3.26 eV, hawlgalka taageeraya hoos danab sare, heerkulka sare, iyo xaaladaha shucaaca sare.
● Adag: Mohs miisaanka 9, hubinta adkeysiga ka dhanka ah xirashada makaanikada inta lagu jiro farsamaynta.
●Isku-balaadhinta kulaylka: 4.2×10−6/K4.2 \ times 10^{-6}/\text{K}4.2×10−6/K, hubinta xasiloonida cabbirka hoos yimaada kala duwanaanta heerkulka.
Halbeegga | Heerka Wax-soo-saarka | Darajada Cilmi-baarista | Dummy Fasalka | Unug |
Darajo | Heerka Wax-soo-saarka | Darajada Cilmi-baarista | Dummy Fasalka | |
Dhexroorka | 76.2 ± 0.5 | 76.2 ± 0.5 | 76.2 ± 0.5 | mm |
Dhumucda | 500 ± 25 | 500 ± 25 | 500 ± 25 | µm |
Hanuuninta Wafer | dhidibka: <0001> ± 0.5° | dhidibka: <0001> ± 2.0° | dhidibka: <0001> ± 2.0° | shahaado |
Cufnaanta Dheecaan yar (MPD) | ≤ 1 | ≤ 5 | ≤ 10 | cm-2^-2-2 |
Iska caabin koronto | ≥ 1E10 | ≥ 1E5 | ≥ 1E5 | Ω·cm |
Dopant | Ka laabasho | Ka laabasho | Ka laabasho | |
Hanuuninta Flat Primary | {1-100} ± 5.0° | {1-100} ± 5.0° | {1-100} ± 5.0° | shahaado |
Dhererka Guriga aasaasiga ah | 32.5 ± 3.0 | 32.5 ± 3.0 | 32.5 ± 3.0 | mm |
Dhererka Guriga Sare | 18.0 ± 2.0 | 18.0 ± 2.0 | 18.0 ± 2.0 | mm |
Hanuuninta Guriga Sare | 90° CW dabaqa hoose ± 5.0° | 90° CW dabaqa hoose ± 5.0° | 90° CW dabaqa hoose ± 5.0° | shahaado |
Ka saarida gees | 3 | 3 | 3 | mm |
LTV/TTV/Bow/Warp | 3 / 10 / ± 30 / 40 | 3 / 10 / ± 30 / 40 | 5 / 15 / ± 40 / 45 | µm |
Qalafsanaanta dusha sare | Si-wejiga: CMP, C-wejiga: La sifayn | Si-wejiga: CMP, C-wejiga: La sifayn | Si-wejiga: CMP, C-wejiga: La sifayn | |
Dildilaaca (Iftiinka xoogga badan) | Midna | Midna | Midna | |
Hex Plates (Iftiinka Xoogga Sare) | Midna | Midna | Aagga isugeynta 10% | % |
Aagaga Noocyo badan (Iftiinka Xoogga Sare) | Aagga isugeynta 5% | Aagga isugeynta 20% | Aagga isugeynta 30% | % |
Xaaqid (Iftiin aad u sarreeya) | ≤ 5 xagtin, dhererka isugaynta ≤ 150 | ≤ 10 xoqid, dhererka isugeynta ≤ 200 | ≤ 10 xoqid, dhererka isugeynta ≤ 200 | mm |
Chipping Edge | Midna ≥ 0.5 mm ballac/ qoto dheer | 2 la ogol yahay ≤ 1 mm ballac/qoto dheer | 5 la ogol yahay ≤ 5 mm ballac/qoto dheer | mm |
Wasakhaynta Dusha sare | Midna | Midna | Midna |
Codsiyada
1. Korontada Elektarooniga ah
Xajmiga ballaaran iyo kuleylka sare ee HPSI SiC substrates ayaa ka dhigaya kuwa ku habboon aaladaha korantada ee ku shaqeeya xaaladaha daran, sida:
●Aaladaha Voltage Sare: Oo ay ku jiraan MOSFETs, IGBTs, iyo Schottky Barrier Diodes (SBDs) si loogu badalo awood hufan.
●Nidaamka tamarta dib loo cusboonaysiin karo: sida rogrogayaasha qoraxda iyo kontaroolayaasha marawaxadaha dabaysha.
●Gawaadhida Korontada (EVs): Waxaa loo isticmaalaa rogo-rogayaasha, dabaylaha, iyo nidaamyada tareennada korontada si loo hagaajiyo waxtarka loona yareeyo cabbirka.
2. Codsiyada RF iyo Microwave
Iska caabbinta sare iyo lumista tamarta yar ee waferrada HPSI waxay lama huraan u yihiin soo noqnoqoshada raadiyaha (RF) iyo nidaamyada microwave-ka, oo ay ku jiraan:
●Kaabayaasha isgaarsiinta: Saldhigyada shabakadaha 5G iyo isgaarsiinta satalaytka.
● Hawada iyo Difaaca: Nidaamyada radar, anteenooyinka qaabaysan, iyo qaybaha avionics.
3. Optoelectronics
Daah-furnaanta iyo bandheynta ballaaran ee 4H-SiC waxay awood u siineysaa isticmaalkeeda aaladaha optoelectronic, sida:
● Sawir-qaadayaasha UV: La socodka deegaanka iyo ogaanshaha caafimaadka.
● LEDs-Awood sare leh: Taageerida nidaamyada nalalka adag ee gobolka.
●Laser Diodes: Loogu talagalay codsiyada warshadaha iyo caafimaadka.
4. Cilmi-baarista iyo Horumarinta
Substrate-ka HPSI SiC ayaa si weyn loogu isticmaalaa shaybaarada tacliinta iyo warshadaha ee R&D si loo sahamiyo agabka horumarsan iyo samaynta aaladaha, oo ay ku jiraan:
●Kobaca lakabka Epitaxial: Daraasado ku saabsan dhimista cilladaha iyo hagaajinta lakabka.
●Daraasaadka Dhaqdhaqaaqa Qaade: Baaritaanka gaadiidka elektaroonigga ah iyo daloolka ee alaabta nadiifka ah.
●Prototyping: Horumarinta hore ee aaladaha cusub iyo wareegyada.
Faa'iidooyinka
Tayada Sare
Nadiifinta sare iyo cufnaanta cilladda hoose waxay siisaa goob lagu kalsoonaan karo oo loogu talagalay codsiyada horumarsan.
Deganaanshaha kulaylka:
Guryaha kala-baxa kulaylka ee aadka u fiican ayaa u oggolaanaya aaladaha inay si hufan ugu shaqeeyaan xaaladaha heerkulka sare iyo awoodda.
Waafaqid Ballaaran:
Jihaynta la heli karo iyo ikhtiyaarrada dhumucda gaarka ah waxay xaqiijinayaan la qabsiga shuruudaha qalabka kala duwan.
Waarta
Qalafsanaanta gaarka ah iyo xasilloonida qaabdhismeedku waxay yareeyaan xidhashada iyo qallooca inta lagu jiro habaynta iyo hawlgalka.
Kala duwanaansho:
Ku habboon warshado kala duwan, laga bilaabo tamarta la cusboonaysiin karo ilaa hawada hawada iyo isgaarsiinta.
Gabagabo
3-inji Nadiifinta Sare ee Semi-Insulating Silicon Carbide wafer waxay ka dhigan tahay meesha ugu sarreysa tignoolajiyada substrate ee awooda sare, soo noqnoqoshada sare, iyo aaladaha indhaha. Isku dhafka kuleylka aadka u fiican, korantada, iyo qalabka farsamada waxay hubisaa waxqabadka la isku halayn karo ee jawiga adag. Laga soo bilaabo korantada elektiroonigga ah iyo nidaamyada RF ilaa optoelectronics iyo R&D horumarsan, kuwan HPSI substrates waxay bixiyaan aasaaska hal-abuurka berrito.
Wixii macluumaad dheeraad ah ama si aad u dalbato, fadlan nala soo xiriir. Kooxdayada farsamada ayaa diyaar u ah inay ku siiyaan hagitaan iyo xulashooyin habeyneed oo ku habboon baahiyahaaga.