Suufka saxaaradda dhoobada ah ee silikoon carbide Tuubada dhoobada ah ee silikoon carbide waxay bixisaa sintering heerkul sare ah oo gaar ah
Astaamaha ugu muhiimsan:
1. Saxanka dhoobada ah ee silikoon carbide
- Adkayn sare iyo iska caabin xirasho: adkaanta waxay u dhowdahay dheemanka, waxayna u adkeysan kartaa xirashada farsamada ee farsamaynta wafer muddo dheer.
- Kobcinta kulaylka sare iyo isku-darka ballaarinta kulaylka oo hooseeya: kala-baxa kulaylka degdegga ah iyo xasilloonida cabbirka, ka fogaanshaha isbeddelka ka dhasha cadaadiska kulaylka.
- Fidsanaan sare iyo dhammaystirka dusha sare: Fidsanaan dusha sare waxay gaartaa heerka micron, taasoo hubinaysa in si buuxda loo xiriiro wafer-ka iyo disk-ga, taasoo yaraynaysa wasakhda iyo dhaawaca.
Xasilloonida kiimikada: Iska caabin xooggan oo daxalka ah, oo ku habboon nadiifinta qoyan iyo hababka xoqidda ee wax soo saarka semiconductor-ka.
2. Tuubada dhoobada ee silikoon carbide
- Iska caabin heerkul sare: Waxay ka shaqayn kartaa jawi heerkul sare oo ka sarreeya 1600°C muddo dheer, oo ku habboon habka heerkulka sare ee semiconductor-ka.
Iska caabin aad u fiican oo daxalka ah: u adkaysta asiidhyada, alkalisyada iyo noocyo kala duwan oo kiimikooyin ah, oo ku habboon deegaannada habka adag.
- Adkayn sare iyo iska caabin xirasho: iska caabbinta nabaad-guurka walxaha iyo xirashada farsamada, dheeree cimriga adeegga.
- Kobcinta kulaylka sare iyo isku-darka hoose ee ballaarinta kulaylka: gudbinta degdegga ah ee kulaylka iyo xasilloonida cabbirka, yaraynta isbeddelka ama dildilaaca ay keento cadaadiska kulaylka.
Halbeegga Alaabta:
Halbeegga saxaaradda dhoobada ee silikoon carbide:
| (Hantida agabka) | (Cutub) | (ssic) | |
| (Waxyaabaha SiC) | (Qaybta)% | >99 | |
| (Celceliska cabbirka hadhuudhka) | micron | 4-10 | |
| (Cufnaanta) | kg/dm3 | >3.14 | |
| (Dulfur muuqda) | Vo1% | <0.5 | |
| (Adkaanshaha Vickers) | HV 0.5 | GPA | 28 |
| *() Xoogga dabacsanaanta* (saddex dhibcood) | 20ºC | MPA | 450 |
| (Awood cadaadis leh) | 20ºC | MPA | 3900 |
| (Modulus Lalab ah) | 20ºC | GPA | 420 |
| (Adkeysiga jabka) | MPa/m'% | 3.5 | |
| (Kordhinta kulaylka) | 20°°C | W/(m*K) | 160 |
| (Is-caabinta) | 20°°C | Ohm.cm | 106-108 |
(Tiirka ballaarinta kulaylka) | a(RT**...80ºC) | K-1*10-6 | 4.3 |
(Heerkulka ugu badan ee hawlgalka) | oºC | 1700 | |
Halbeegga tuubada dhoobada ee silikoon carbide:
| Alaabta | Tusmada |
| α-SIC | 99% daqiq |
| Fosfooraska Muuqda | 16% ugu badnaan |
| Cufnaanta Badan | 2.7g/cm3 daqiiqo |
| Xoogga Laabista Heerkulka Sare | 100 Mpa ugu yaraan |
| Isugeynta Ballaarinta Kulaylka | K-1 4.7x10 -6 |
| Isugeynta Qaboojinta Kulaylka (1400ºC) | 24 W/mk |
| Heerkulka ugu badan ee Shaqada | 1650ºC |
Codsiyada ugu muhiimsan:
1. Saxanka dhoobada ah ee silikoon carbide
- Goynta iyo nadiifinta Wafer-ka: waxay u adeegtaa sidii goob lagu qaado si loo hubiyo saxnaan iyo xasillooni sare inta lagu jiro jarista iyo nadiifinta.
- Habka Lithography: Wafer-ku wuxuu ku xiran yahay mashiinka lithography si loo hubiyo meelaynta saxda ah ee sare inta lagu jiro soo-gaadhista.
- Nadiifinta Farsamada Kiimikada (CMP): waxay u shaqeysaa sidii goob taageero ah oo loogu talagalay suufka dhalaalinta, iyadoo bixinaysa cadaadis isku mid ah iyo qaybinta kulaylka.
2. Tuubada dhoobada ee silikoon carbide
- Tuubada foornada heerkulka sare leh: waxaa loo isticmaalaa qalabka heerkulka sare leh sida foornada faafinta iyo foornada oksaydhka si loogu qaado buskudka daaweynta habka heerkulka sare leh.
- Habka CVD/PVD: Sida tuubo qaadasho oo ku jirta qolka falcelinta, oo u adkaysta heerkulka sare iyo gaasaska daxalka leh.
- Qalabka qalabka semiconductor-ka: loogu talagalay beddelayaasha kulaylka, dhuumaha gaaska, iwm., si loo hagaajiyo hufnaanta maaraynta kulaylka ee qalabka.
XKH waxay bixisaa adeegyo badan oo gaar ah oo loogu talagalay saxaaradaha dhoobada ah ee silicon carbide, koobabka nuugista iyo tuubooyinka dhoobada ah ee silicon carbide. Saxannada dhoobada ah ee silicon carbide iyo koobabka nuugista, XKH waxaa loo habeyn karaa iyadoo loo eegayo shuruudaha macaamiisha ee cabbirro kala duwan, qaabab iyo qallafsanaan dusha sare ah, waxayna taageertaa daaweynta dahaarka gaarka ah, waxay kor u qaaddaa iska caabbinta xirashada iyo iska caabbinta daxalka; Tuubooyinka dhoobada ah ee silicon carbide, XKH waxay habeyn kartaa noocyo kala duwan oo dhexroor gudaha ah, dhexroor dibadda ah, dherer iyo qaab-dhismeed adag (sida tuubo qaabaysan ama tuubo daloolo leh), waxayna bixin kartaa dahaarka dhalaalinta, ka-hortagga oksaydhka iyo hababka kale ee daaweynta dusha sare. XKH waxay hubineysaa in macaamiishu ay si buuxda uga faa'iideysan karaan faa'iidooyinka waxqabadka ee alaabada dhoobada ah ee silicon carbide si ay u daboolaan shuruudaha adag ee goobaha wax soo saarka ee heerka sare ah sida semiconductors, leds iyo photovoltaics.
Jaantus Faahfaahsan




