Silicon carbide saxaarad dhoobo ah oo silicon carbide tuubada dhoobada ah ee Silicon carbide tuubada dhoobada ah ee Silicon carbide tuubada dhoobada waxay keentaa heerkul sare oo hagaajinaya habaynta caadada
Tilmaamaha ugu muhiimsan:
1. saxaarad dhoobo ah oo silikon carbide ah
- Adkeysiga sare iyo xirashada caabbinta: engegnaanta waxay ku dhowdahay dheeman, waxayna u adkeysan kartaa xirashada farsamada ee farsamaynta waferka muddo dheer.
- Kordhinta kulaylka sare iyo isku-dhafka fidinta kulaylka hooseeya: kuleylka degdega ah iyo xasilloonida cabbirka, ka fogaanshaha qallafsanaanta uu keeno cadaadiska kulaylka.
- Fiirsanaanta sare iyo dhameynta dusha sare: Fikirka dusha sare waa ilaa heerka micron, hubinta xiriirka buuxa ee u dhexeeya waferka iyo saxanka, yaraynta wasakheynta iyo dhaawaca.
Degenaansho kiimikaad: Iska caabin daxalka xooggan, oo ku habboon nadiifinta qoyan iyo geeddi-socodka xoqidda ee wax-soo-saarka semiconductor.
2. Tuubbada dhoobada ee Silicon carbide
- Iska caabin heerkul sarreeya: Waxay ka shaqayn kartaa jawi heerkul sare ah oo ka sarreeya 1600 ° C muddo dheer, oo ku habboon habka heerkulka sare ee semiconductor.
Iska caabin daxalka heer sare ah: adkaysi u acids, alkalis iyo noocyo kala duwan oo dareere kiimikaad, ku haboon jawi hab adag.
- Adkeysiga sare iyo xirashada caabbinta: iska caabbinta nabaad-guurka iyo xirashada farsamada, kordhi nolosha adeegga.
- Dhaqdhaqaaqa kulaylka sare iyo isugeynta hoose ee ballaarinta kulaylka: dhaqsaha kuleylka iyo xasilloonida cabbirka, yaraynta qallafsanaanta ama dillaaca ay keento diiqada kulaylka.
Qiyaasta Alaabta:
Halbeegga saxaaradda dhoobada ee Silicon carbide:
(Hantida agabka) | (Cutub) | (sic) | |
(Nuxurka SiC) | (Wt)% | >99 | |
(Celceliska cabbirka hadhuudhka) | micron | 4-10 | |
(cufnaanta) | kg/dm3 | >3.14 | |
(Porosity muuqata) | Vo1% | <0.5 | |
(Eegyga Vickers) | HV 0.5 | GPA | 28 |
*() Xoog dabacsanaan* (saddex dhibcood) | 20ºC | MPa | 450 |
(Awood cadaadis leh) | 20ºC | MPa | 3900 |
(Modulus Elastic) | 20ºC | GPA | 420 |
(Aadkayga jabka) | MPa/m'% | 3.5 | |
(xakamaynta kulaylka) | 20°ºC | W/(m*K) | 160 |
(iska caabin ah) | 20°ºC | Ahm.cm | 106-108 |
(isku xidhka balaadhinta kulaylka) | a(RT**...80ºC) | K-1*10-6 | 4.3 |
(Heer kulka shaqada ugu badan) | oºC | 1700 |
Qiyaasta tuubada dhoobada ee Silicon carbide:
Walxaha | Tusmada |
α-SIC | 99% min |
Muuqda Porosity | 16% ugu badnaan |
Cufnaanta Bulk | 2.7g/cm3 daq |
Laacidda xoogga heerkulka sare | 100 Mpa min |
Isku-dhafka Balaadhinta kulaylka | K-1 4.7x10 -6 |
Isku-dhafka Hab-dhaqanka Kulaylka (1400ºC) | 24 W/mk |
Max. Heerkulka shaqada | 1650ºC |
Codsiyada ugu muhiimsan:
1. saxan dhoobada silikon carbide
- Goynta Wafer-ka iyo dhalaalka: waxay u adeegtaa sidii madal wax-soo-saarka si loo hubiyo saxnaanta sare iyo xasilloonida inta lagu jiro jarista iyo dhalaalka.
- Habka Lithography: Waferku wuxuu ku go'an yahay mashiinka lithography si loo hubiyo meelaynta saxda ah ee saxda ah inta lagu jiro soo-gaadhista.
- Polishing Mechanical Chemical (CMP): waxay u shaqeysaa sidii madal taageero oo loogu talagalay suufka suufka, iyadoo bixisa cadaadis isku mid ah iyo qaybinta kulaylka.
2. Tuubbada dhoobada ee Silicon carbide
- Tuubbada foornada heerkulka sare: loo isticmaalo qalabka heerkulka sare sida foornada faafinta iyo foornada oksaydhka si loo qaado maraqyada loogu talagalay daaweynta habka heerkulka sare.
- Habka CVD/PVD: Sida tuubbada xajinta ee qolka falcelinta, adkaysi u leh heerkulka sare iyo gaaska daxalka.
- Qalabka qalabka semiconductor: ee kuleyliyeyaasha kulaylka, dhuumaha gaaska, iwm, si loo hagaajiyo waxtarka maareynta kulaylka ee qalabka.
XKH waxay bixisaa adeegyo gaar ah oo dhamaystiran oo loogu talagalay saxarada dhoobada silikoon carbide, koobabka wax lagu nuugo iyo tuubooyinka dhoobada silikoon carbide. Silicon carbide saxaarad dhoobo ah iyo koobabka nuugista, XKH waxaa lagu habeyn karaa iyadoo loo eegayo shuruudaha macaamiisha ee cabbirrada kala duwan, qaababka iyo qallafsanaanta dusha sare, iyo taageerada daaweynta dahaarka gaarka ah, kor u qaadista iska caabbinta xirashada iyo iska caabinta daxalka; Tuubooyinka dhoobada silikoon carbide, XKH waxay habeyn kartaa noocyo kala duwan oo dhexroor gudaha ah, dhexroorka dibadda, dhererka iyo qaab dhismeedka adag (sida tuubada qaabaysan ama tuubada daloolka leh), waxayna bixisaa dhalaalid, daahan anti-oxidation iyo hababka kale ee daaweynta dusha sare. XKH waxay hubisaa in macaamiishu ay si buuxda uga faa'iidaysan karaan faa'iidooyinka waxqabadka alaabada dhoobada silikoon carbide si ay u buuxiyaan shuruudaha u baahan ee goobaha wax soo saarka ee dhamaadka-dhamaadka ah sida semiconductors, LEDs iyo photovoltaics.
Jaantus faahfaahsan



