Substrate-ka SiC 3 inji 350um dhumucdiisuna tahay nooca HPSI Prime Grade Dummy grade
Guryaha
| Halbeegga | Heerka Wax Soo Saarka | Darajada Cilmi-baarista | Fasalka Madow | Cutubka |
| Fasal | Heerka Wax Soo Saarka | Darajada Cilmi-baarista | Fasalka Madow | |
| Dhexroorka | 76.2 ± 0.5 | 76.2 ± 0.5 | 76.2 ± 0.5 | mm |
| Dhumucda | 500 ± 25 | 500 ± 25 | 500 ± 25 | µm |
| Jihaynta Wafer-ka | Dhidibka dul saaran: <0001> ± 0.5° | Dhidibka: <0001> ± 2.0° | Dhidibka: <0001> ± 2.0° | shahaado |
| Cufnaanta Tuubooyinka Yaryar (MPD) | ≤ 1 | ≤ 5 | ≤ 10 | cm−2^-2−2 |
| Iska caabinta Korontada | ≥ 1E10 | ≥ 1E5 | ≥ 1E5 | Ω·cm |
| Dopant | Lama isticmaalin | Lama isticmaalin | Lama isticmaalin | |
| Jihada Fidsan ee Aasaasiga ah | {1-100} ± 5.0° | {1-100} ± 5.0° | {1-100} ± 5.0° | shahaado |
| Dhererka Fidsan ee Aasaasiga ah | 32.5 ± 3.0 | 32.5 ± 3.0 | 32.5 ± 3.0 | mm |
| Dhererka Fidsan ee Labaad | 18.0 ± 2.0 | 18.0 ± 2.0 | 18.0 ± 2.0 | mm |
| Jihada Fidsan ee Labaad | 90° CW laga bilaabo guriga koowaad ± 5.0° | 90° CW laga bilaabo guriga koowaad ± 5.0° | 90° CW laga bilaabo guriga koowaad ± 5.0° | shahaado |
| Ka-saarista Cidhifka | 3 | 3 | 3 | mm |
| LTV/TTV/Qaanso/Warp | 3 / 10 / ±30 / 40 | 3 / 10 / ±30 / 40 | 5 / 15 / ±40 / 45 | µm |
| Qalafsanaanta Dusha sare | Si-wejiga: CMP, C-wejiga: La safeeyey | Si-wejiga: CMP, C-wejiga: La safeeyey | Si-wejiga: CMP, C-wejiga: La safeeyey | |
| Dildilaacyo (Iftiinka Xoogga Badan) | Midna ma jiro | Midna ma jiro | Midna ma jiro | |
| Saxannada Hex (Iftiinka Xoogga Sare leh) | Midna ma jiro | Midna ma jiro | Aagga guud 10% | % |
| Meelaha Nooca Badan (Iftiinka Xoogga Badan) | Aagga wadarta 5% | Aagga guud 20% | Baaxadda guud 30% | % |
| Xoqitaan (Iftiinka Xoogga Sare leh) | ≤ 5 xoqan, dhererka wadarta ≤ 150 | ≤ 10 xoqan, dhererka wadarta ≤ 200 | ≤ 10 xoqan, dhererka wadarta ≤ 200 | mm |
| Jabinta geeska | Midna ≥ 0.5 mm ballac/qoto dheer | 2 la oggol yahay ≤ 1 mm ballac/qoto dheer | 5 la oggol yahay ≤ 5 mm ballac/qoto dheer | mm |
| Wasakhowga Dusha Sare | Midna ma jiro | Midna ma jiro | Midna ma jiro |
Codsiyada
1. Elektarooniga Awoodda Sare leh
Gudbinta kulaylka sare iyo farqiga ballaaran ee wafers-ka SiC ayaa ka dhigaya kuwo ku habboon aaladaha awoodda sare leh, kuwa soo noqnoqda sare leh:
●MOSFET-yada iyo IGBT-yada loogu talagalay beddelka awoodda.
●Nidaamyada korontada ee baabuurta korontada ku shaqeeya ee horumarsan, oo ay ku jiraan qalabka korontada ku shaqeeya iyo kuwa wax lagu dallaco.
●Kaabayaasha shabakadda casriga ah iyo nidaamyada tamarta la cusboonaysiin karo.
2. Nidaamyada RF iyo Microwave-ka
Substrates-ka SiC waxay awood u siinayaan codsiyada RF-ga iyo microwave-ka ee soo noqnoqda sare leh iyadoo luminta calaamadda ay yar tahay:
● Nidaamyada isgaarsiinta iyo dayax-gacmeedka.
●Nidaamyada raadaarka hawada sare.
●Qaybaha shabakadda 5G ee horumarsan.
3. Qalabka Elektarooniga ah iyo Dareemayaasha
Sifooyinka gaarka ah ee SiC waxay taageeraan codsiyo kala duwan oo optoelectronic ah:
● Qalabka lagu ogaado shucaaca UV-ga ee la socodka deegaanka iyo dareenka warshadaha.
● Qalabka LED iyo laysarka ee loogu talagalay nalalka adag iyo qalabka saxda ah.
● Dareemayaasha heerkulka sare ee warshadaha hawada sare iyo baabuurta.
4. Cilmi-baaris iyo Horumarin
Kala duwanaanshaha darajooyinka (Waxsoosaarka, Cilmi-baarista, Dummy) waxay suurtogal ka dhigaysaa tijaabinta ugu dambeysa iyo tijaabinta qalabka ee akadeemiyadda iyo warshadaha.
Faa'iidooyinka
● Kalsooni:Iska caabin iyo xasillooni aad u fiican dhammaan heerarka.
● Habayn:Jihooyinka iyo dhumucda loo habeeyey si ay ugu habboonaadaan baahiyaha kala duwan.
●Daacad Sare:Halabuurka aan la isticmaalin wuxuu hubiyaa kala duwanaansho yar oo la xiriira wasakhda.
● Cabbiraadda:Waxay buuxisaa shuruudaha wax soo saarka ballaaran iyo cilmi-baarista tijaabada labadaba.
Waferada SiC ee 3-inji ah ee saafiga sare leh waa albaabka aad ka geli karto aaladaha waxqabadka sare leh iyo horumarka tignoolajiyada ee cusub. Wixii su'aalo ah iyo tilmaamo faahfaahsan, nala soo xiriir maanta.
Soo Koobid
Wafers-ka 3-inji ah ee High Purity Silicon Carbide (SiC), oo laga heli karo Wax-soo-saarka, Cilmi-baarista, iyo Darajooyinka Dummy, waa substrates heer sare ah oo loogu talagalay elektaroonigga awoodda sare leh, nidaamyada RF/mikrowev-ka, optoelectronics, iyo R&D horumarsan. Wafers-yadan waxay leeyihiin sifooyin aan la furin, oo nus-dabool ah oo leh iska caabin aad u fiican (≥1E10 Ω·cm Heerka Wax-soo-saarka), cufnaanta micropipe-ka oo hooseysa (≤1 cm−2^-2−2), iyo tayada dusha sare ee gaarka ah. Waxaa loo habeeyay codsiyada waxqabadka sare leh, oo ay ku jiraan beddelka awoodda, isgaarsiinta, dareemaha UV, iyo teknoolojiyada LED. Iyada oo leh jihooyin la beddeli karo, hufnaan kuleyl oo heer sare ah, iyo sifooyin farsamo oo adag, wafers-yadan SiC waxay awood u siinayaan sameynta qalab hufan oo la isku halleyn karo iyo hal-abuur cusub oo ka dhaca warshadaha oo dhan.
Jaantus Faahfaahsan
