Saxaarad dhoobo dhoobo ah oo loo yaqaan 'SiC chuck saxaarad'
Sifooyinka walxaha:
1.High hardness: adkaanta Mohs ee silikon carbide waa 9.2-9.5, labaad oo kaliya in diamond, oo leh caabbinta xirashada adag.
2. Kuleylka sare ee kuleylka: heerkulka kuleylka ee silikoon carbide waa mid aad u sarreeya 120-200 W / m · K, kaas oo si dhakhso ah u baabi'in kara kulaylka wuxuuna ku habboon yahay jawiga heerkulka sare.
3. Isku xidhka balaadhinta kulaylka hoose: Silicon carbide fidinta kulaylka kuleylku waa hooseeyaa (4.0-4.5×10⁻⁶/K), wali waxay ilaalin kartaa xasiloonida cabbirka heerkulka sare.
4. Degganaanshaha kiimikaad: Silicon carbide acid iyo caabbinta daxalka alkali, ku habboon isticmaalka deegaanka daxalka kiimikada.
5. Awoodda farsamada sare: carbide silicon waxay leedahay xoog foorarsi sare leh iyo xoog cadaadis leh, waxayna u adkeysan kartaa culeyska farsamada ee weyn.
Astaamaha:
1.In warshadaha semiconductor, maraqa aadka u khafiifka ah ayaa loo baahan yahay in lagu dhejiyo koob nuugista vacuum ah, nuugista faakuumka waxaa loo isticmaalaa in lagu hagaajiyo maraqa, iyo habka wax-soo-saarka, khafiifinta, dhuxista, nadiifinta iyo goynta ayaa lagu sameeyaa maraqa.
2.Silicon carbide sucker wuxuu leeyahay dabeecad kuleyl wanaagsan, wuxuu si wax ku ool ah u gaabin karaa wakhtiga wax-soo-saarka iyo wax-soo-saarka, hagaajinta waxtarka wax-soo-saarka.
3.Silicon carbide vacuum sucker waxa kale oo uu leeyahay caabbinta daxalka alkali iyo acid wanaagsan.
4.Marka la barbar dhigo saxan qaadaha corundum ee dhaqameed, soo gaabin rarista iyo dejinta kuleylka iyo qaboojinta, hagaajinta waxtarka shaqada; Isla mar ahaantaana, waxay hoos u dhigi kartaa xirashada inta u dhaxaysa taarikada sare iyo hoose, ilaalinta saxnaanta diyaaradda, iyo kordhinta nolosha adeegga qiyaastii 40%.
5.Qaybta maadada waa mid yar, miisaan fudud. Way u fududahay hawl-wadeenada inay qaataan palette-yada, taasoo yaraynaysa khatarta shilalka isku dhaca ee ay sababaan dhibaatooyinka gaadiidka ilaa 20%.
6.Size: dhexroorka ugu sarreeya 640mm; Flatness: 3um ama ka yar
Goobta codsiga:
1. Wax-soo-saarka Semiconductor
●Waferka habaynta:
Ku hagaajinta wafer ee sawir-qaadista, etching, dhigista filimka khafiifka ah iyo hababka kale, hubinta saxnaanta sare iyo habka joogtada ah. Heerkulkeeda sare iyo iska caabbinta daxalka waxay ku habboon tahay bay'ada wax soo saarka semiconductor adag.
●Kobaca Epitaxial:
SiC ama GaN kobaca epitaxial, sida gudbiyaha kuleylka iyo hagaajinta maraqa, hubinta isku mid ahaanshaha heerkulka iyo tayada kareemka heerkulka sare, hagaajinta waxqabadka qalabka.
2. Qalabka korontada ku shaqeeya
●Wax soo saarka LED:
Loo isticmaalo in lagu hagaajiyo sapphire ama substrate SiC, iyo sida kuleyliyaha kuleyliyaha ee habka MOCVD, si loo hubiyo isku mid ahaanshaha koritaanka epitaxial, hagaajinta tayada iftiinka iftiinka LED.
●Laser diode:
Sida qalabka saxda ah ee saxda ah, hagaajinta iyo kuleylinta substrate si loo hubiyo xasiloonida heerkulka, hagaajinta awoodda wax soo saarka iyo isku halaynta diode laysarka.
3. Mashiinka saxda ah
● Habaynta qaybaha indhaha:
Waxaa loo isticmaalaa in lagu hagaajiyo qaybaha saxda ah sida muraayadaha indhaha iyo filtarrada si loo hubiyo saxnaanta sare iyo wasakhowga hooseeya inta lagu jiro farsamaynta, waxayna ku habboon tahay mashiinnada xoogga badan.
●Shaqada dhoobada:
Sida xasiloonida sare ee xasiloonida, waxay ku haboon tahay mashiinka saxda ah ee alaabta dhoobada si loo hubiyo saxsanaanta mashiinka iyo joogteynta heerkulka sare iyo deegaanka daxalka.
4. Tijaabooyin cilmiyeed
●Tijaabada heerkulka sare:
Qalabka muunad hagaajinta heerkulka sare, waxay taageertaa tijaabooyinka heerkulka xad dhaafka ah ee ka sarreeya 1600 ° C si loo hubiyo isku midnimada heerkulka iyo xasilloonida muunadda.
●Baaritaan vacuum:
Sida muunad hagaajinta iyo kuleyliyaha kuleyliyaha deegaanka faakuumka, si loo hubiyo saxnaanta iyo ku celcelinta tijaabada, ku haboon dahaarka faakuumka iyo daaweynta kulaylka.
Tilmaamaha Farsamada:
| (Hantida agabka) | (Cutub) | (sic) | |
| (Nuxurka SiC) |
| (Wt)% | >99 |
| (Celceliska cabbirka hadhuudhka) |
| micron | 4-10 |
| (cufnaanta) |
| kg/dm3 | >3.14 |
| (Porosity muuqata) |
| Vo1% | <0.5 |
| (Eegyga Vickers) | HV 0.5 | GPA | 28 |
| *(Awoodda dabacsanaanta) | 20ºC | MPa | 450 |
| (Awood cadaadis leh) | 20ºC | MPa | 3900 |
| (Modulus Elastic) | 20ºC | GPA | 420 |
| (Aadkayga jabka) |
| MPa/m'% | 3.5 |
| (xakamaynta kulaylka) | 20°ºC | W/(m*K) | 160 |
| (iska caabin ah) | 20°ºC | Ahm.cm | 106-108 |
|
| a(RT**...80ºC) | K-1*10-6 | 4.3 |
|
|
| oºC | 1700 |
Sannado badan oo ururin farsamo iyo waayo-aragnimo warshadeed, XKH waxa ay awood u leedahay in ay habayso cabbirrada muhiimka ah sida cabbirka, habka kuleylinta iyo naqshadeynta xayaysiisyada vacuum ee chuck iyada oo loo eegayo baahiyaha gaarka ah ee macaamilka, hubinta in alaabtu si fiican ugu habboon tahay habka macaamilka. SiC silikoon carbide dhoobada dhoobada waxay noqdeen qaybo lagama maarmaanka u ah farsamaynta wafer, korriinka epitaxial iyo hababka kale ee muhiimka ah sababtoo ah kulaylkooda wanaagsan, xasiloonida heerkulka sare iyo xasiloonida kiimikada. Gaar ahaan soo saarista qalabka jiilka saddexaad ee semiconductor sida SiC iyo GaN, baahida loo qabo dhoobada dhoobada silikoon carbide ayaa sii socota inay koraan. Mustaqbalka, iyadoo horumarinta degdega ah ee 5G, baabuurta korantada, sirdoonka macmal iyo teknoolajiyada kale, rajada codsiga ee silicon carbide dhoobada chucks ee warshadaha semiconductor noqon doonaa ballaaran.
Jaantus faahfaahsan
