Substrate Sapphire qaabaysan PSS 2inch 4inch 6inch ICP etching qalalan ayaa loo isticmaali karaa chips LED
Sifada asaasiga ah
1. Sifooyinka maadada: Maaddada substrate-ka waa sapphire-ka quraarad ah (Al₂O₃), oo leh qallafsanaan sare, caabbinta kulaylka sare iyo xasilloonida kiimikada.
2. Qaab dhismeedka dusha sare: Dusha sare waxa ay samaysaa sawir qaade oo u ekaanaysa qaab-dhismeedka micro-nano ee xilliyada ah, sida koojyada, Ahraamta ama arraysyada lix geesoodka ah.
3. Waxqabadka indhaha: Iyada oo loo marayo naqshadaynta naqshadaynta dusha sare, wadarta guud ee iftiinka iftiinka ee is-dhexgalka ayaa la dhimay, iyo waxtarka iftiinka iftiinka ayaa la hagaajiyaa.
4. Waxqabadka kulaylka: Substrate Sapphire wuxuu leeyahay kuleyl heer sare ah, oo ku habboon codsiyada tamarta sare ee LED.
5. Qiyaasaha cabbirka: Cabbirrada guud waa 2 inji (50.8mm), 4 inji (100mm) iyo 6 inji (150mm).
Meelaha ugu muhiimsan ee codsiga
1. Wax soo saarka LED:
Waxtarka iftiinka iftiinka oo la hagaajiyay: PSS waxay yaraynaysaa luminta iftiinka iyada oo loo marayo naqshadaynta, si weyn u hagaajinaysa iftiinka LED-ka iyo waxtarka iftiinka.
Tayada koritaanka epitaxial ee la hagaajiyay: Qaab dhismeedka qaabaysan wuxuu bixiyaa saldhig korriin oo wanaagsan oo loogu talagalay lakabyada Epitaxial ee GaN waxayna wanaajisaa waxqabadka LED.
2. Laser Diode (LD):
Laydhka awoodda sare leh: Xakamaynta kulaylka sare iyo xasilloonida PSS waxay ku habboon yihiin diodes leysarka awoodda sare, hagaajinta waxqabadka kulaylka iyo kalsoonida.
Xadka hoose ee hadda: Kor u qaad kobaca epitaxial, yaree heerka hadda ee diode laysarka, oo wanaaji waxtarka.
3. Sawir qaade:
Dareen sare: gudbinta iftiinka sare iyo cufnaanta cilladda hoose ee PSS waxay hagaajisaa dareenka iyo xawaaraha jawaabta sawir-qaadaha.
Jawaab-celin ballaadhan: ku habboon ogaanshaha sawir-qaadista ee ultraviolet ilaa baaxad muuqata.
4. Korontada elegtarooniga ah:
Iska caabbinta korantada sare: Daboolka sare ee Sapphire iyo xasilloonida kulaylka ayaa ku habboon aaladaha korantada sare.
Kuleyl wax ku ool ah: Dhaqdhaqaaqa kulaylka sare wuxuu hagaajiyaa waxqabadka kulaylka ee qalabka korontada wuxuuna dheereeyaa nolosha adeegga.
5. Qalabka Rf:
Waxqabadka soo noqnoqda ee sarreeya: Khasaaraha dielectric hooseeya iyo xasilloonida kulaylka sare ee PSS waxay ku habboon yihiin aaladaha RF ee soo noqnoqda.
Qaylada hoose: Fiirnaanta sare iyo cufnaanta cilladda hoose waxay yaraynaysaa qaylada aaladda waxayna wanaajisaa tayada calaamadaha.
6. Biosensors:
Ogaanshaha dareenka sare: Gudbinta iftiinka sare iyo xasiloonida kiimikada ee PSS waxay ku habboon yihiin biosensors dareenka sare.
Biocompatibility: Laqabsiga noole ee sapphire wuxuu ka dhigayaa mid ku haboon codsiyada caafimaadka iyo soo saarista noolaha.
Substrate sapphire qaabaysan (PSS) oo wata walxaha Epitaxial GaN:
Sapphire substrate-ka qaabaysan (PSS) waa substrate ku habboon kobaca epitaxial GaN (gallium nitride). Joogtada joogtada ah ee sapphire waxay ku dhowdahay GaN, taas oo yareyn karta is-maan-dhaafka iyo cilladaha koritaanka epitaxial. Qaab dhismeedka micro-nano ee dusha PSS kaliya ma wanaajiyo waxtarka soo saarista iftiinka, laakiin sidoo kale wuxuu wanaajiyaa tayada crystal ee lakabka epitaxial GaN, taas oo hagaajinaysa waxqabadka iyo kalsoonida LED-ka.
Xuduudaha farsamada
| Shayga | Substrate Sapphire qaabaysan (2 ~ 6inch) | ||
| Dhexroorka | 50.8 ± 0.1 mm | 100.0 ± 0.2 mm | 150.0 ± 0.3 mm |
| Dhumucda | 430 ± 25μm | 650 ± 25μm | 1000 ± 25μm |
| Hanuuninta dusha sare | C-diyaarad (0001) xagal ka baxsan dhidibka M- (10-10) 0.2 ± 0.1° | ||
| C-diyaarad (0001) xagal ka baxsan dhidibka (11-20) 0 ± 0.1° | |||
| Hanuuninta Flat Primary | A-Diyaarad (11-20) ± 1.0° | ||
| Dhererka Guriga aasaasiga ah | 16.0 ± 1.0 mm | 30.0 ± 1.0 mm | 47.5 ± 2.0 mm |
| R-Diyaarad | 9-saac | ||
| Dhammaadka dusha sare ee hore | Hannaan habaysan | ||
| Dhammaadka dusha sare ee dambe | SSP: Dhulka Fiican, Ra=0.8-1.2um; DSP: Epi-polished, Ra <0.3nm | ||
| Calaamadaha leysarka | Dhinaca dambe | ||
| TTV | ≤8μm | ≤10μm | ≤20μm |
| BOOSAA | ≤10μm | ≤15μm | ≤25μm |
| WARP | ≤12μm | ≤20μm | ≤30μm |
| Ka saarida gees | ≤2 mm | ||
| Tilmaamaha Qaabka | Qaab-dhismeedka | Dome, Koon, Ahraamta | |
| Dhererka qaabka | 1.6 ~ 1.8μm | ||
| Dhexroorka Qaabka | 2.75 ~ 2.85μm | ||
| Meesha Qaabka | 0.1-0.3μm | ||
XKH waxay ku takhasustay bixinta sapphire substrates (PSS) oo tayo sare leh oo leh taageero farsamo iyo adeeg iib kadib si ay uga caawiso macaamiisha inay helaan hal abuur hufan oo dhinaca LED-ka, bandhiga iyo optoelectronics.
1. Qalabka PSS ee tayada sare leh: Qalabka sapphire-ka ah ee qaabaysan ee cabbirro kala duwan (2 ", 4", 6 ") si loo daboolo baahiyaha LED-ka, bandhigyada iyo qalabka optoelectronic.
2. Naqshad la habeeyey: Habee qaab-dhismeedka micro-nano dusha sare ah (sida koorta, Ahraamta ama qaab-dhismeedka laba geesoodka) sida waafaqsan baahida macaamiisha si loo hagaajiyo waxtarka soo saarista iftiinka.
3. Taageerada farsamada: Bixi naqshadaynta codsiga PSS, habka wanaajinta iyo la-tashiga farsamada si loo caawiyo macaamiisha hagaajinta waxqabadka alaabta.
4. Taageerada koritaanka Epitaxial: PSS oo la jaan qaada GaN epitaxial maaddooyinka ayaa la bixiyaa si loo hubiyo kobaca lakabka epitaxial oo tayo sare leh.
5. Tijaabinta iyo shahaado bixinta: Bixi warbixinta tayada tayada ee PSS si loo hubiyo in alaabadu ay la kulmaan heerarka warshadaha.
Jaantus faahfaahsan
