Qallalan qallalan oo loo sameeyay Sapphire Substrate PSS 2inch 4inch 6inch ICP ah ayaa loo isticmaali karaa jajabyada LED-ka
Astaamaha Muhiimka ah
1. Astaamaha Maaddada: Maaddada substrate-ka waa hal safayr kiristaal ah (Al₂O₃), oo leh adkeysi sare, iska caabin kulayl sare iyo xasillooni kiimiko.
2. Qaab-dhismeedka dusha sare: Dusha sare waxaa lagu sameeyaa sawir-qaadis iyo ku-qori qaab-dhismeedyo yaryar oo nano ah oo xilliyeed ah, sida koonooyin, haram ama safyo lix-geesood ah.
3. Waxqabadka indhaha: Iyada oo loo marayo naqshadeynta qaabaynta dusha sare, iftiinka guud ee muuqaalka ayaa la dhimayaa, waxtarka soo saarista iftiinkana waa la hagaajiyaa.
4. Waxqabadka kulaylka: Substrate-ka Sapphire wuxuu leeyahay gudbin kuleyl oo aad u fiican, oo ku habboon codsiyada LED-ka awoodda sare leh.
5. Tilmaamaha cabbirka: Cabbirrada caadiga ah waa 2 inji (50.8mm), 4 inji (100mm) iyo 6 inji (150mm).
Meelaha ugu muhiimsan ee codsiga
1. Wax soo saarka LED-ka:
Waxtarka soo saarista iftiinka oo la hagaajiyay: PSS waxay yareysaa luminta iftiinka iyada oo loo marayo naqshadaynta qaabaynta, si weyn ayay u hagaajineysaa dhalaalka LED-ka iyo hufnaanta iftiinka.
Tayada koritaanka epitaxial oo la hagaajiyay: Qaab-dhismeedka qaabaysan wuxuu bixiyaa saldhig korriin oo wanaagsan oo loogu talagalay lakabka epitaxial ee GaN wuxuuna hagaajiyaa waxqabadka LED-ka.
2. Laydhka Diode (LD):
Laser-yada awoodda sare leh: Kobcinta kulaylka sare iyo xasilloonida PSS waxay ku habboon yihiin diode-yada laser-ka awoodda sare leh, taasoo hagaajinaysa waxqabadka kala-baxa kulaylka iyo isku halaynta.
Koronto heer hoose ah: Hagaaji koritaanka epitaxial, yaree qulqulka heerka ee diode-ka laysarka, iyo hagaajinta hufnaanta.
3. Sawir-qaade:
Xasaasiyadda Sare: Gudbinta iftiinka sare iyo cufnaanta cilladaha hooseeya ee PSS waxay hagaajisaa xasaasiyadda iyo xawaaraha jawaabta ee sawir-qaadaha.
Jawaab ballaaran oo muuqaal ah: ku habboon ogaanshaha sawir-qaadista ee ultraviolet-ka ilaa meel la arki karo.
4. Qalabka elektarooniga ah ee korontada ku shaqeeya:
Iska caabinta danab sare: Dahaarka sare ee Sapphire iyo xasilloonida kulaylka ayaa ku habboon aaladaha korontada korantada sare leh.
Kala-baxa kulaylka oo hufan: Kala-qaadista kulaylka oo sareysa waxay hagaajisaa waxqabadka kala-baxa kulaylka ee aaladaha korontada waxayna dheereysaa cimriga adeegga.
5. Qalabka Rf:
Waxqabadka soo noqnoqoshada sare: Lumitaanka dielectric-ka hooseeya iyo xasilloonida kulaylka sare ee PSS ayaa ku habboon aaladaha RF ee soo noqnoqda sare leh.
Buuqa hooseeya: Fidsanaan sare iyo cufnaan cilladaysan oo hooseeya ayaa yareeya buuqa qalabka waxayna hagaajiyaan tayada calaamadda.
6. Dareemayaasha Bayoolojiga:
Ogaanshaha xasaasiyadda sare: Gudbinta iftiinka sare iyo xasilloonida kiimikada ee PSS waxay ku habboon yihiin dareemayaasha bayoolaji ee xasaasiga sare leh.
Iswaafajinta Bayoolajiga: Iswaafajinta bayoolajiga ee safayrku waxay ka dhigaysaa mid ku habboon codsiyada caafimaadka iyo ogaanshaha bayoolajiga.
Substrate safayr ah oo qaabaysan (PSS) oo leh walxo epitaxial GaN ah:
Substrate-ka safayr-ka ee qaabaysan (PSS) waa substrate ku habboon koritaanka epitaxial-ka GaN (gallium nitride). Joogtada shabagga ee safayr-ka ayaa u dhow GaN, kaas oo yarayn kara isku-dheelitir la'aanta shabagga iyo cilladaha koritaanka epitaxial-ka. Qaab-dhismeedka micro-nano ee dusha sare ee PSS ma aha oo kaliya inuu hagaajiyo hufnaanta soo saarista iftiinka, laakiin sidoo kale wuxuu hagaajiyaa tayada kiristaalka ee lakabka epitaxial-ka GaN, taasoo hagaajinaysa waxqabadka iyo isku halaynta LED-ka.
Xuduudaha farsamada
| Shay | Substrate Sapphire ah oo qaabaysan (2 ~ 6 inji) | ||
| Dhexroorka | 50.8 ± 0.1 mm | 100.0 ± 0.2 mm | 150.0 ± 0.3 mm |
| Dhumucda | 430 ± 25μm | 650 ± 25μm | 1000 ± 25μm |
| Jihaynta Dusha Sare | C-plane (0001) oo ka baxsan xagasha dhanka M-dhidibka (10-10) 0.2 ± 0.1° | ||
| C-plane (0001) oo ka baxsan xagasha dhanka A-dhidibka (11-20) 0 ± 0.1° | |||
| Jihada Fidsan ee Aasaasiga ah | Diyaarad A (11-20) ± 1.0° | ||
| Dhererka Fidsan ee Aasaasiga ah | 16.0 ± 1.0 mm | 30.0 ± 1.0 mm | 47.5 ± 2.0 mm |
| R-Plane | 9-saac | ||
| Dhammaadka Dusha Hore | Qaabaysan | ||
| Dhammaystirka Dusha Dambe | SSP:Dhul fiican, Ra=0.8-1.2um; DSP:Daabacsan, Ra<0.3nm | ||
| Calaamadda laysarka | Dhinaca dambe | ||
| TV-ga | ≤8μm | ≤10μm | ≤20μm |
| QAANSO | ≤10μm | ≤15μm | ≤25μm |
| WARP | ≤12μm | ≤20μm | ≤30μm |
| Ka-saarista Cidhifka | ≤2 mm | ||
| Qeexitaanka Qaabka | Qaab-dhismeedka Qaabka | Dome, Koon, Ahraam | |
| Dhererka Qaabka | 1.6 ~ 1.8μm | ||
| Dhexroorka Qaabka | 2.75 ~ 2.85μm | ||
| Meel Qaabaysan | 0.1~0.3μm | ||
XKH waxay ku takhasustay bixinta qalabka sapphire-ka ee tayo sare leh oo qaabaysan (PSS) oo leh taageero farsamo iyo adeeg iib kadib si ay macaamiisha uga caawiso inay gaaraan hal-abuur hufan oo ku saabsan LED-ka, bandhigga iyo optoelectronics-ka.
1. Sahayda PSS oo tayo sare leh: Substrate-yada safayr-ka ah ee qaabaysan oo cabbirro kala duwan leh (2 ", 4", 6") si loo daboolo baahiyaha qalabka LED-ka, bandhigga iyo qalabka elektaroonigga ah.
2. Naqshad gaar ah: Habee qaab-dhismeedka dusha sare ee micro-nano (sida koonka, haramka ama safka lix-geesoodka ah) iyadoo loo eegayo baahiyaha macaamiisha si loo wanaajiyo hufnaanta soo saarista iftiinka.
3. Taageero farsamo: Bixi naqshadaynta codsiga PSS, hagaajinta habka iyo la-talinta farsamada si looga caawiyo macaamiisha inay horumariyaan waxqabadka badeecada.
4. Taageerada koritaanka epitaxial: PSS oo la jaanqaadaysa walxaha epitaxial ee GaN ayaa la bixiyaa si loo hubiyo koritaanka lakabka epitaxial tayo sare leh.
5. Tijaabinta iyo shahaadada: Bixi warbixinta kormeerka tayada PSS si loo hubiyo in alaabtu ay buuxiso heerarka warshadaha.
Jaantus Faahfaahsan
