LT Lithium Tantalate (LiTaO3) Crystal 2inch/3inch/4inch/6inch Orientaiton Y-42°/36°/108° Dhumucdiisuna 250-500um
Xuduudaha farsamada
| Magaca | LiTaO3 heerka indhaha | Heerka miiska codka LiTaO3 |
| Axial | Goynta Z + / - 0.2 ° | 36 ° Y jarid / 42 ° Y jarid / X jarid(+ / - 0.2 °) |
| Dhexroorka | 76.2mm + / - 0.3mm/100±0.2mm | 76.2mm + /-0.3mm100mm + /-0.3mm 0r 150±0.5mm |
| Diyaaradda Datum | 22mm + / - 2mm | 22mm +/-2mm32mm +/-2mm |
| Dhumucda | 500um + /-5mm1000um + /-5mm | 500um + /-20mm350um + /-20mm |
| TV-ga | ≤ 10um | ≤ 10um |
| Heerkulka Curie | 605 °C + / - 0.7 °C (Habka DTA) | 605 °C + / -3 °C (Habka DTA) |
| Tayada dusha sare | Nadiifinta laba-geesoodka ah | Nadiifinta laba-geesoodka ah |
| Cidhifyada Chamfered | wareegsanaan gees ah | wareegsanaan gees ah |
Astaamaha Muhiimka ah
1. Qaab-dhismeedka Crystal iyo Waxqabadka Korantada
· Xasiloonida kiristaaliga: 100% 4H-SiC oo ah nooca polytype, eber ku darista multicrystalline (tusaale ahaan, 6H/15R), oo leh qalooca ruxaya XRD oo ballac buuxa leh oo ah nus-ugu badnaan (FWHM) ≤32.7 arcsec.
· Dhaqdhaqaaqa Qaadaha Sare: Dhaqdhaqaaqa elektarooniga ah ee 5,400 cm²/V·s (4H-SiC) iyo dhaqdhaqaaqa godadka oo ah 380 cm²/V·s, taasoo suurtogalinaysa naqshadaha qalabka soo noqnoqda sare.
· Adkaanta Shucaaca: Waxay u adkaysataa shucaaca neutron-ka 1 MeV iyadoo heerka dhaawaca barokaca uu yahay 1 × 10¹⁵ n/cm², oo ku habboon codsiyada hawada sare iyo nukliyeerka.
2. Guryaha Kuleylka iyo Farsamada
· Qaboojinta Kulaylka ee Gaarka ah: 4.9 W/cm·K (4H-SiC), saddex jibaaran oo silicon ah, oo taageera hawlgalka ka sarreeya 200°C.
· Isku-darka Ballaarinta Kulaylka Hoose: CTE oo ah 4.0×10⁻⁶/K (25–1000°C), hubinta iswaafajinta baakadaha ku salaysan silikoon iyo yareynta cadaadiska kulaylka.
3. Xakamaynta iyo Saxnaanta Habaynta Cilladda
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· Cufnaanta dhuumaha yaryar: <0.3 cm⁻² (8-inji wafers), cufnaanta kala-baxa <1,000 cm⁻² (lagu xaqiijiyay iyada oo loo marayo KOH etching).
· Tayada Dusha Sare: CMP-la safeeyey ilaa Ra <0.2 nm, iyadoo la buuxinayo shuruudaha heerka fidsan ee heerka lithography ee EUV.
Codsiyada Muhiimka ah
| Domain-ka | Xaaladaha Codsiga | Faa'iidooyinka Farsamada |
| Isgaarsiinta Indhaha | 100G/400G leysarka, modules isku-dhafan oo silicon photonics ah | Substrates-ka abuurka InP waxay awood u siinayaan farqiga tooska ah (1.34 eV) iyo heteroepitaxy-ga ku salaysan Si, taasoo yaraynaysa luminta isku xidhka indhaha. |
| Gawaarida Tamarta Cusub | Dareewalada korantada sare ee 800V, kuwa lagu dallaco (OBC) | Substrates-ka 4H-SiC waxay u adkeysan karaan >1,200 V, taasoo yareyneysa khasaaraha gudbinta 50% iyo mugga nidaamka 40%. |
| Isgaarsiinta 5G | Qalabka RF-ga ee Millimeter-hirka (PA/LNA), kor u qaadayaasha awoodda saldhigga saldhigga | Substrates-ka SiC ee nus-dabool ah (iska caabinta >10⁵ Ω·cm) waxay suurtageliyaan isku-darka dadban ee soo noqnoqda sare (60 GHz+). |
| Qalabka Warshadaha | Dareemayaasha heerkulka sare, transformers-ka hadda jira, kormeerayaasha fal-galka nukliyeerka | Substrates-ka abuurka InSb (0.17 eV bandgap) waxay bixiyaan xasaasiyad birlab ah ilaa 300% @ 10 T. |
Wafers LiTaO₃ - Astaamaha Muhiimka ah
1. Waxqabadka Sare ee Piezoelectric
· Isku-dhafka sare ee piezoelectric (d₃₃~8-10 pC/N, K²~0.5%) wuxuu awood u siinayaa aaladaha SAW/BAW ee soo noqnoqda sare leh iyadoo gelinta ay lumiso <1.5dB shaandheeyayaasha RF 5G
· Isku xidhka elektaroonigga ah ee aadka u fiican wuxuu taageeraa naqshadaha shaandhaynta ee ballaaran (≥5%) ee codsiyada sub-6GHz iyo mmWave
2. Astaamaha Indhaha
· Hufnaanta ballaaran (>70% gudbinta laga bilaabo 400-5000nm) ee modulators-ka elektiroonigga ah ee gaaraya ballac ballaaran oo ka badan 40GHz
· Nuglaanta indhaha ee aan tooska ahayn (χ⁽²⁾~30pm/V) waxay sahlaysaa jiilka iswaafajinta labaad ee hufan (SHG) ee nidaamyada laysarka
3. Xasiloonida Deegaanka
· Heerkulka Curie Sare (600°C) wuxuu ilaaliyaa jawaabta piezoelectric ee jawiga baabuurta (-40°C ilaa 150°C)
· Dareeraha kiimikada ee ka dhanka ah asiidhyada/alkaliyada (pH1-13) wuxuu hubiyaa isku halaynta codsiyada dareemayaasha warshadaha
4. Awoodaha Habaynta
· Injineernimada jihaynta: X-cut (51°), Y-cut (0°), Z-cut (36°) oo loogu talagalay jawaabaha piezoelectric ee loogu talagalay
· Xulashooyinka daawada: Mg-doped (iska caabbinta waxyeelada indhaha), Zn-doped (d₃₃ oo la xoojiyay)
· Dhammaystirka dusha sare: Nadiifinta Epitaxial-ready (Ra<0.5nm), biraha ITO/Au
Wafers LiTaO₃ - Codsiyada Aasaasiga ah
1. Modules-yada Hore ee RF
· Shaandheeyayaasha 5G NR SAW (Xiddiga n77/n79) oo leh isku-darka heerkulka soo noqnoqda (TCF) <|-15ppm/°C|
· Resonators-ka BAW ee aadka u ballaaran ee loogu talagalay WiFi 6E/7 (5.925-7.125GHz)
2. Sawir-qaadista Isku-dhafan
· Modulator-yada xawaaraha sare leh ee Mach-Zehnder (>100Gbps) ee isgaarsiinta indhaha ee isku dhafan
· Qalabka ogaanshaha infrared-ka QWIP oo leh hirarka goynta oo laga beddeli karo 3-14μm
3. Elektarooniga Gawaarida
· Dareemayaasha baarkinka ee Ultrasonic oo leh > 200kHz inta jeer ee hawlgalka
· Transducer-yada TPMS ee ka badbaaday wareegga kulaylka -40°C ilaa 125°C
4. Nidaamyada Difaaca
· Shaandheeyayaasha qaataha EW oo leh > 60dB diidmo ka baxsan xarigga
· Daaqadaha IR-ga ee gantaalada raadinaya ayaa gudbinaya shucaaca 3-5μm MWIR
5. Teknoolojiyada Soo Kordhaysa
· Qalabka beddelka kuantumka indhaha ee loogu talagalay beddelka microwave-ka ilaa indhaha
· Qalabka PMUT ee sawir-qaadista ultrasound-ka caafimaadka (> 20MHz xallinta)
Wafers LiTaO₃ - Adeegyada XKH
1. Maareynta Silsiladda Sahayda
· Habaynta Boule-to-wafer oo leh waqti hogaamineed oo 4 toddobaad ah oo loogu talagalay qeexitaannada caadiga ah
· Wax soo saar kharash-ool ah oo keenaya faa'iido 10-15% ah marka loo eego tartamayaasha
2. Xalalka Gaarka ah
· Wafering-ka gaarka ah ee jihada: 36°±0.5° Y-jarid si loo helo waxqabadka SAW ee ugu wanaagsan
· Halabuurka daawada la mariyey: MgO (5mol%) daawada lagu mariyo ee loogu talagalay isticmaalka indhaha
Adeegyada Bir-samaynta: Qaabaynta elektroodka Cr/Au (100/1000Å)
3. Taageerada Farsamada
· Astaamaha walxaha: Qaloocyada ruxitaanka XRD (FWHM <0.01°), falanqaynta dusha sare ee AFM
· Jilitaanka qalabka: Moodeelidda FEM ee loogu talagalay hagaajinta naqshadeynta shaandhada SAW
Gunaanad
Wafers-ka LiTaO₃ waxay sii wadaan inay awood u siiyaan horumarinta tignoolajiyada isgaarsiinta RF, photonics-ka isku dhafan, iyo dareemayaasha deegaanka ee adag. Khibradda agabka ee XKH, saxnaanta wax soo saarka, iyo taageerada injineernimada codsiga waxay ka caawiyaan macaamiisha inay ka gudbaan caqabadaha naqshadeynta ee nidaamyada elektaroonigga ah ee jiilka soo socda.









