Wafer LiTaO3 2inji-8inji 10x10x0.5 mm 1sp 2sp oo loogu talagalay Isgaarsiinta 5G/6G
Xuduudaha farsamada
| Magaca | LiTaO3 heerka indhaha | Heerka miiska codka LiTaO3 |
| Axial | Goynta Z + / - 0.2 ° | 36 ° Y jarid / 42 ° Y jarid / X jarid (+ / - 0.2 °) |
| Dhexroorka | 76.2mm + / - 0.3mm/ 100±0.2mm | 76.2mm + /-0.3mm 100mm + /-0.3mm 0r 150±0.5mm |
| Diyaaradda Datum | 22mm + / - 2mm | 22mm +/-2mm 32mm +/-2mm |
| Dhumucda | 500um + /-5mm 1000um + /-5mm | 500um + /-20mm 350um + /-20mm |
| TV-ga | ≤ 10um | ≤ 10um |
| Heerkulka Curie | 605 °C + / - 0.7 °C (Habka DTA) | 605 °C + / -3 °C (Habka DTA) |
| Tayada dusha sare | Nadiifinta laba-geesoodka ah | Nadiifinta laba-geesoodka ah |
| Cidhifyada Chamfered | wareegsanaan gees ah | wareegsanaan gees ah |
Astaamaha Muhiimka ah
1. Waxqabadka korantada iyo indhaha
· Koronto-Optic Coefficient: r33 wuxuu gaaraa 30 pm/V (X-cut), 1.5× ayuu ka sarreeyaa LiNbO3, taasoo suurta gelinaysa habaynta elektaroonigga ah ee aadka u ballaaran (>40 GHz bandwidth).
· Jawaabta Balaadhan ee Muuqaalada: Kala duwanaanshaha gudbinta 0.4–5.0 μm (dhumucda 8 mm), oo leh gees nuugista ultraviolet-ka oo hooseeya ilaa 280 nm, oo ku habboon laysarka UV iyo aaladaha dhibcaha quantum.
· Isku-xidhka Pyroelectric-ga ee Hoose: dP/dT = 3.5×10⁻⁴ C/(m²·K), taasoo hubinaysa xasilloonida dareemayaasha infrared-ka heerkulka sare leh.
2. Guryaha Kuleylka iyo Farsamada
· Wareegga Kulaylka Sare: 4.6 W/m·K (X-cut), afar jibbaaran oo ah quartz, wareegga kulaylka -200–500°C oo joogto ah.
· Isku-darka Ballaarinta Kulaylka Hoose: CTE = 4.1×10⁻⁶/K (25–1000°C), oo la jaan qaadaya baakadaha silikoon si loo yareeyo cadaadiska kulaylka.
3. Xakamaynta iyo Saxnaanta Khaladka
· Cufnaanta dhuumaha yaryar: <0.1 cm⁻² (8-inji wafers), cufnaanta kala-baxa <500 cm⁻² (lagu xaqiijiyay iyada oo loo marayo KOH etching).
· Tayada Dusha Sare: CMP-la safeeyey ilaa Ra <0.5 nm, iyadoo la buuxinayo shuruudaha heerka fidsan ee heerka lithography ee EUV.
Codsiyada Muhiimka ah
| Domain | Xaaladaha Codsiga | Faa'iidooyinka Farsamada |
| Isgaarsiinta Indhaha | 100G/400G DWDM lasers, modules isku-dhafan oo silicon photonics ah | Gudbinta baaxadda leh ee LiTaO3 wafer iyo luminta hagaha hirarka oo hooseeya (α <0.1 dB/cm) waxay suurtagelinaysaa ballaarinta xarkaha C. |
| Isgaarsiinta 5G/6G | Shaandheeyayaasha SAW (1.8–3.5 GHz), shaandheeyayaasha BAW-SMR | Waferada 42° Y-cut waxay gaaraan Kt² >15%, iyagoo keenaya luminta gelinta oo hooseysa (<1.5 dB) iyo rogidda sare (>30 dB). |
| Tiknoolajiyada Quantum | Qalabka ogaanshaha hal-foton, ilo-is-weydaarsi hoos-u-dhac ah | Isku-dhafka sare ee aan tooska ahayn (χ(2) = 40 pm/V) iyo heerka tirada mugdiga ah oo hooseeya (<100 tirinta/s) waxay kor u qaadaan daacadnimada tirada. |
| Dareenka Warshadaha | Dareemayaasha cadaadiska heerkulka sare, transformers-ka hadda jira | Jawaabta piezoelectric-ka ee LiTaO3 wafer (g33 >20 mV/m) iyo dulqaadka heerkulka sare (>400°C) waxay ku habboon yihiin jawi aad u daran. |
Adeegyada XKH
1. Sameynta Wafer-ka Gaarka ah
· Cabbirka iyo Jarida: Wafers 2–8-inji ah oo leh X/Y/Z-cut, 42° Y-cut, iyo jaritaanno xagal gaar ah (±0.01° dulqaad).
· Xakamaynta Daweynta: Fe, Mg doping iyada oo loo marayo habka Czochralski (kala duwanaanshaha xoogga 10¹⁶–10¹⁹ cm⁻³) si loo wanaajiyo isku-dhafka elektiroonigga ah iyo xasilloonida kulaylka.
2. Tiknoolajiyada Habraaca Sare
;
· Tiknoolajiyada Wareega ah (PPLT): Tiknoolajiyada Smart-Cut ee loogu talagalay wafers-ka LTOI, iyadoo la gaarayo saxnaanta muddada domainka ±10 nm iyo beddelka soo noqnoqda ee isku-dhafka ah (QPM).
· Isku-dhafka Kala Duwan: Wafers isku-dhafan oo LiTaO3 ah oo ku salaysan Si (POI) oo leh xakamaynta dhumucda (300–600 nm) iyo conductivity kulaylka ilaa 8.78 W/m·K oo loogu talagalay shaandheeyayaasha SAW ee soo noqnoqda sare leh.
3. Nidaamyada Maareynta Tayada
;
· Tijaabada Dhammaadka-ilaa-Dhamaadka: Raman spectroscopy (xaqiijinta nooca polytype), XRD (crystallinity), AFM (qaab-dhismeedka dusha sare), iyo tijaabada isku-midnimada indhaha (Δn <5×10⁻⁵).
4. Taageerada Silsiladda Sahayda Caalamiga ah
;
· Awoodda Wax-soo-saarka: Wax-soo-saarka bishii ka badan 5,000 oo wafer (8-inji: 70%), oo leh gaarsiin degdeg ah oo 48 saacadood ah.
· Shabakadda Saadka: Daboolida Yurub, Waqooyiga Ameerika, iyo Aasiya-Baasifigga iyada oo loo marayo xamuulka hawada/badda oo leh baakad heerkulku xakamaysan yahay.









