Mashiin laba jibbaaran oo labajibaaran monocrystalline silicon ul farsamaynta 6/8/12 inch flatness oogada Ra≤0.5μm

Mashiin laba jibbaaran oo labajibbaaran monocrystalline silicon ul farsamaynta 6/8/12 inch flatness oogada Ra≤0.5μm Sawirka

Sharaxaad Gaaban:

Monocrystalline silicon double station mashiin laba jibaaran waa qalab wax ku ool ah oo loogu talagalay farsamaynta ulaha silicon monocrystalline (Ingot). Waxay qabataa naqshad labanlaab ah oo isku dhafan oo saldhigeed waxayna gooyn kartaa laba ulood oo silikon isku mar, taasoo si weyn u wanaajineysa waxtarka wax soo saarka. Qalabku wuxuu u shaqeeyaa ulo silikoon cylindrical ah silikoon square / quasi-square silicon blocks (Grit) iyada oo loo marayo tignoolajiyada goynta siliga dheemanka ama daabyada miinshaarta wareegyada gudaha, diyaarinta jeexjeexyada xiga (sida samaynta waferrada silikoon), waxaana si weyn loogu isticmaalaa isku xirka qalabka silikon ee warshadaha sawir-qaadista iyo semiconductor.

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Faahfaahinta Alaabta

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Tilmaamaha qalabka:

(1) Habayn isku mid ah oo laba-geesood ah
Waxtarka labanlaab: Habaynta isku mar ee laba ulood oo silikoon ah (Ø6"-12") waxay kordhisaa wax soo saarka 40% -60% vs. Qalabka Simplex.

Xakamaynta madax-bannaan: Saldhig kastaa wuxuu si madax-bannaan u hagaajin karaa cabbirrada goynta (xeerka, xawaaraha quudinta) si uu ula qabsado qaababka kala duwan ee usha silikoon.

(2) Goynta sare ee saxda ah
Saxnaanta cabbirka: dulqaadka masaafada dhinaca bar labajibbaaran ± 0.15mm, kala duwan ≤0.20mm.

Tayada dusha sare: goynta cidhifyada <0.5mm, yarayso xadiga shiidada xigta.

(3) Xakamaynta caqliga
Goynta la qabsiga: la socodka wakhtiga dhabta ah ee qaab-dhismeedka usha silikon, hagaajinta firfircoon ee dariiqa goynta (sida farsamaynta usha silikoon qaloocan).

· Raadinta xogta: diiwaan geli cabbirrada habaynta ee usha silikoon kasta si ay u taageerto xidhitaanka nidaamka MES.

(4) Kharash yar oo la isticmaali karo
Isticmaalka siliga dheeman: ≤0.06m/mm (dhererka usha silikoonka), dhexroorka siliga ≤0.30mm.

Wareegga qaboojiyaha: Nidaamka sifaynta wuxuu kordhiyaa nolosha adeegga wuxuuna yareeyaa daadinta dareeraha qashinka.

Farsamada iyo faa'iidooyinka horumarka:

(1) Goynta tignoolajiyada hagaajinta
- Goynta khadadka badan: 100-200 xariiqyo dheeman ah ayaa loo isticmaalaa isbarbardhigga, iyo xawaaraha goynta waa ≥40mm / min.

- Xakamaynta xiisadda: Nidaamka hagaajinta wareegga xiran (± 1N) si loo yareeyo khatarta jabinta siliga.

(2) Kordhinta waafaqid
La qabsiga agabka: Taageerada nooca P-nooca monocrystalline silikoon, oo la jaan qaadaya TOPCon, HJT iyo ulo kale oo silikoon batari tayo sare leh.

- Cabbirka dabacsan: dhererka usha silikoon 100-950mm, masaafada dhinac ul labajibbaaran 166-233mm la hagaajin karo.

(3) Kor u qaadida otomaatiga
- Rarista iyo dejinta Robot: si toos ah u rarista/dejinta ulaha silikoon, garaac ≤3 daqiiqo.

- Baadhista caqliga leh: Dayactirka saadaalinta si loo yareeyo wakhtiga dhimista ee aan la qorshayn.

(4) Hoggaanka warshadaha
- Taageerada wafer: waxay farsamayn kartaa ≥100μm silikon khafiif ah oo khafiif ah oo leh ulo labajibbaaran, heerka jajabinta <0.5%.

- Kordhinta isticmaalka tamarta: Isticmaalka tamarta unug kasta oo usha silikoon ah ayaa la dhimay 30% (marka loo eego qalabka dhaqanka).

Qiyaasaha farsamada

Magaca halbeegga	Qiimaha index
Tirada baararka la habeeyey	2 xabbo / dhig
Kala duwanaanshaha dhererka baararka farsamaynta	100 ~ 950mm
Kala duwanaanshaha margin machining	166 ~ 233mm
Xawaaraha jarista	≥40mm/daqiiqo
Xawaaraha siliga dheeman	0 ~ 35m/s
Dhexroor dheeman	0.30 mm ama ka yar
Isticmaalka tooska ah	0.06 m/mm ama ka yar
Dhexroor usha wareega ee ku habboon	Dhammaystirka dhexroorka usha labajibbaaran ee +2mm, Hubi heerka ka gudubka dhalaalka
Xakamaynta jebinta cidhifyada	Cidhifka ceeriin ≤0.5mm, Ma jajabin, tayada dusha sare
lebbiska dhererka Arc	Qiyaasta qiyaasta <1.5mm, Marka laga reebo qalloocinta usha silikoon
Cabirka mashiinka (mashiinka keliya)	4800×3020×3660mm
Wadarta awooda la qiimeeyay	56kW
Miisaanka qalabka dhintay	12t

Shaxda saxda ah ee mashiinka:

Shayga saxda ah	Kala duwanaanshaha dulqaadka
Dulqaadka bar labajibbaaran	±0.15mm
kala duwanaanshaha cidhifyada bar labajibbaaran	≤0.20mm
Xagasha dhammaan dhinacyada usha labajibbaaran	90°±0.05°
Flat of usha square	≤0.15mm
Robot ku celceliyay saxnaanta meelaynta	±0.05mm

Adeegyada XKH:

XKH waxay bixisaa adeegyo wareeg ah oo buuxa oo loogu talagalay mashiinnada laba-geesoodka ah ee mono-crystalline silicon, oo ay ku jiraan hagaajinta qalabka (ku habboon ulaha silikoon ee waaweyn), habka komishanka (goynta hagaajinta cabbirka), tababarka hawlgalka iyo taageerada iibka ka dib (qaybaha muhiimka ah, ogaanshaha fogaanta), hubinta in macaamiishu ay helaan wax-soo-saar sare (> 99%) iyo wax-soo-saarka qiimaha hooseeya, iyo bixinta hagaajinta farsamada (sida AI). Muddada dhalmada waa 2-4 bilood.