AlN-on-NPSS Wafer: Lakabka Aluminium Nitride Waxqabadka Sare ee Sapphire Substrate-ka aan Toosanayn ee Heerkulka Sare, Awood Sare, iyo Codsiyada RF

Sharaxaad Gaaban:

Waferka AlN-on-NPSS wuxuu isku daraa lakabka nitride aluminium ee waxqabadka sare leh (AlN) oo leh lakabka sapphire substrate (NPSS) si uu u bixiyo xal ku habboon heerkulka sare, awoodda sare, iyo codsiyada soo noqnoqda raadiyaha (RF). Isku darka gaarka ah ee dhaqdhaqaaqa kulaylka gaarka ah ee AlN iyo sifooyinka korantada, oo ay weheliso xoogga farsamada ee ugu fiican ee substrate-ka, ayaa ka dhigaysa waferkan doorashada la door bidayo dalabaadka codsiyada sida korantada korontada, aaladaha soo noqnoqda sare, iyo qaybaha indhaha. Iyada oo kulaylka aad u fiican, luminta hooseeya, iyo ku habboonaanta jawiga heerkulka sare, waferkan ayaa awood u siinaya horumarinta qalabka soo socda ee leh waxqabad sare.

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Astaamaha

Lakabka AlN Waxqabadka Sare: Aluminium Nitride (AlN) waxaa loo yaqaanaadhaqdhaqaaqa kulaylka sare(~200 W/m·K),xadhig ballaaraniyodanab burburka sare, taasoo ka dhigaysa wax ku habboonawood sare, soo noqnoqoshada sareiyoheerkul sarecodsiyada.

Substrate-ka Sapphire (NPSS)Sapphire-ka aan turxaan lahayn wuxuu bixiyaa akharash-ku-ool ah, farsamo ahaan adagsaldhigga, hubinta aasaaska xasilloon ee koritaanka epitaxial iyada oo aan kakanaanta polishing dusha. Qalabka farsamaysan ee aadka u wanaagsan ee NPSS ayaa ka dhigaya mid u adkaysata bay'adaha adag.

Deganaanshaha kulaylka Sare: Waferka AlN-on-NPSS wuxuu u adkeysan karaa isbedbeddelka heerkulka ba'an, taasoo ka dhigaysa mid ku habboon isticmaalkakorontada korontada, hababka baabuurta, LEDsiyocodsiyada indhahakuwaas oo u baahan waxqabad deggan xaaladaha heerkulka sare.

Dahaarka Korontada: AlN waxay leedahay sifooyin koronto oo heer sare ah, taasoo ka dhigaysa mid ku habboon codsiyada halkago'doomin korontowaa muhiim, oo ay ku jiraanQalabka RFiyoelektarooniga microwave-ka.

Diidmada Kulaylka Sare: Iyada oo kuleyl heer sare ah, lakabka AlN wuxuu xaqiijiyaa daadinta kulaylka waxtarka leh, taas oo lagama maarmaan u ah ilaalinta waxqabadka iyo muddada dheer ee qalabka ku shaqeeya awoodda sare iyo soo noqnoqda.

Qiyaasaha Farsamada

Halbeegga	Tilmaamid
Dhexroorka Wafer	2-inch, 4-inch (xajmiga gaarka ah ayaa la heli karaa)
Nooca Substrate	Substrate-ka Sapphire (NPSS)
Dhumucda lakabka AlN	2µm ilaa 10µm (la beddeli karo)
Dhumucda substrate	430µm ± 25µm (loogu talagalay 2-inji), 500µm ± 25µm (loogu talagalay 4-inji)
Habdhaqanka kulaylka	200 W/m·K
Iska caabin koronto	Dahaarka sare, oo ku habboon codsiyada RF
Dusha sare ee Roughness	Ra ≤ 0.5µm (lakabka AlN)
Nadiifnimada Maaddada	Nadaafadda sare ee AlN (99.9%)
Midabka	Cadaan/off-cad (Lakabka AlN oo leh midab khafiif ah oo NPSS ah)
Wafer Warp	<30µm (caadi)
Nooca Doping	Un-doped (waa la beddeli karaa)

Codsiyada

TheAlN-on-NPSS waferwaxaa loogu talagalay codsiyo waxqabad sare leh oo kala duwan oo kala duwan oo warshado badan ah:

Qalabka Elektarooniga ah ee Awood-sare lehLakabka AlN ee kulaylka sare ee dahaarka iyo guryaha dahaarka ayaa ka dhigaya wax ku habboontransistors koronto, hagaajintaiyoawoodda ICsloo isticmaalobaabuur, warshadahaiyotamarta la cusboonaysiin karonidaamyada.

Qaybaha Soo noqnoqda Raadiyaha (RF).: Qalabka koronto ee ugu fiican ee AlN, oo ay weheliso khasaare yar, waxay awood u yeelataa soo saaristatransistors RF, HEMTs (High-Electron-Mobility Transistors), iyo kuwo kaleqaybaha microwavekuwaas oo si hufan ugu shaqeeya xawli sare iyo heer koronto.

Qalabka indhaha: Waferrada AlN-on-NPSS waxaa lagu isticmaalaa gudahadareeraha laysarka, LEDsiyosawirqaadayaasha, halkaas oodhaqdhaqaaqa kulaylka sareiyoxoogga farsamadawaxay lama huraan u yihiin in la joogteeyo waxqabadka muddada dheer.

Dareemayaasha Heerkulka Sare: Awoodda waferku u leedahay in ay u adkeysato kulaylka ba'an ayaa ka dhigaysa mid ku habboondareemayaasha heerkulkaiyola socodka deegaankawarshadaha sidahawada sare, baabuuriyosaliid & gaaska.

Baakadaha Semiconductor: loo isticmaalo fidiya kulaylkaiyolakabyada maamulka kulaylkanidaamyada baakadaha, hubinta isku halaynta iyo hufnaanta semiconductors.

Q&A

S: Waa maxay faa'iidada ugu weyn ee wafers AlN-on-NPSS marka loo eego agab dhaqameed sida silikoon?

J: Faa'iidada ugu weyn waa AlN'sdhaqdhaqaaqa kulaylka sare, taas oo u oggolaanaysa in ay si hufan u daadiso kuleylka, taas oo ka dhigaysa mid ku habboonawood sareiyocodsiyada soo noqnoqda sarehalkaas oo maaraynta kulaylku ay muhiim tahay. Intaa waxaa dheer, AlN waxay leedahay axadhig ballaaranoo aad u fiicandahaarka korontada, taas oo ka dhigaysa mid ka sareysa isticmaalka gudahaRFiyoqalabka microwavemarka loo eego silikoon dhaqameed.

S: Lakabka AlN ee waferrada NPSS ma la beddeli karaa?

J: Haa, lakabka AlN waxa loo habayn karaa marka la eego dhumucda (u dhaxaysa 2µm ilaa 10µm ama ka badan) si loo daboolo baahiyaha gaarka ah ee codsigaga. Waxa kale oo aanu bixinaa habaynta marka la eego nooca doping-ka (N-nooca ama P-nooca) iyo lakabyo dheeraad ah oo loogu talagalay hawlo gaar ah.

S: Waa maxay codsiga caadiga ah ee waferkan ee warshadaha baabuurta?

J: Warshadaha baabuurta, waferrada AlN-on-NPSS ayaa inta badan lagu isticmaalaa gudahakorontada korontada, Nidaamyada iftiinka LEDiyodareemayaasha heerkulka. Waxay bixiyaan maaraynta kulaylka sare iyo dahaarka korantada, taas oo lagama maarmaan u ah nidaamyada waxtarka sare leh ee ku shaqeeya xaaladaha heerkulka kala duwan.