8inch SiC heerka wafer wafer 4H-N SiC substrate

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8-inch substrates SiC waxaa loo isticmaalaa aaladaha elegtarooniga ah ee awooda sare leh, sida awooda MOSFET-yada (Metal Oxide Semiconductor Field Effect Transistor), Schottky diodes iyo aaladaha kale ee korontadu.

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Jadwalka soo socdaa wuxuu tusinayaa tilmaamahayaga 8inch wafers SiC:

8inch N-nooca SiC DSP Specs
Tirada	Shayga	Unug	Wax soo saar	Cilmi baaris	nacasnimo
1:parameters
1.1	nooca badan	--	4H	4H	4H
1.2	jihaynta dusha sare	°	<11-20>4±0.5	<11-20>4±0.5	<11-20>4±0.5
2:Qalabka korantada
2.1	dopanant	--	n-nooca Nitrogen	n-nooca Nitrogen	n-nooca Nitrogen
2.2	iska caabin	ah ·cm	0.015-0.025	0.01-0.03	NA
3:Mechanical parameter
3.1	dhexroorka	mm	200±0.2	200±0.2	200±0.2
3.2	dhumucdiisuna	μm	500± 25	500± 25	500± 25
3.3	Hanuuninta darajada	°	[1- 100]±5	[1- 100]±5	[1- 100]±5
3.4	Qoto dheer	mm	1 ~ 1.5	1 ~ 1.5	1 ~ 1.5
3.5	LTV	μm	≤5(10mm*10mm)	≤5(10mm*10mm)	≤10 (10mm*10mm)
3.6	TTV	μm	≤10	≤10	≤15
3.7	Qaansada	μm	-25-25	-45-45	-65-65
3.8	Warp	μm	≤30	≤50	≤70
3.9	AFM	nm	Ra≤0.2	Ra≤0.2	Ra≤0.2
4:Stucture
4.1	cufnaanta micropipe	ee/cm2	≤2	≤10	≤50
4.2	maadada birta ah	atamka/cm2	≤1E11	≤1E11	NA
4.3	TSD	ee/cm2	≤500	≤1000	NA
4.4	BPD	ee/cm2	≤2000	≤5000	NA
4.5	TED	ee/cm2	≤7000	≤10000	NA
5.Tayada hore
5.1	hore	--	Si	Si	Si
5.2	dusha sare dhammayn	--	Si-wejiga CMP	Si-wejiga CMP	Si-wejiga CMP
5.3	qayb	ea/wafer	≤100 (xajmiga≥0.3μm)	NA	NA
5.4	xoqin	ea/wafer	≤5, Wadarta Dhererka≤200mm	NA	NA
5.5	Cidhif chips/indents/ dildilaaca/ wasakhowga	--	Midna	Midna	NA
5.6	Aagagga nooca badan	--	Midna	Aagga ≤10%	Aagga ≤30%
5.7	calaamadaynta hore	--	Midna	Midna	Midna
6:Tayada danbe
6.1	dib u dhammayn	--	C-waji xildhibaan	C-waji xildhibaan	C-waji xildhibaan
6.2	xoqin	mm	NA	NA	NA
6.3	Cilladaha dhabarka gees chips/indents	--	Midna	Midna	NA
6.4	Dhabar xumada	nm	Ra≤5	Ra≤5	Ra≤5
6.5	Calaamadaynta dhabarka	--	Darajo	Darajo	Darajo
7: gees
7.1	gees	--	Chamfer	Chamfer	Chamfer
8:Baakad
8.1	baakad	--	Epi- diyaar u ah faakuum baakad	Epi- diyaar u ah faakuum baakad	Epi- diyaar u ah faakuum baakad
8.2	baakad	--	Multi-wafer baakad cajalad	Multi-wafer baakad cajalad	Multi-wafer baakad cajalad