8 inji SiC Wafer heer wax soo saar ah 4H-N SiC substrate
Shaxda soo socota waxay muujinaysaa qeexitaannada buskudyada SiC ee 8 inji ah:
| 8-inch N-nooca SiC DSP Shuruudaha | |||||
| Lambar | Shay | Cutubka | Soo saarista | Cilmi-baaris | Nacasnimo |
| 1: cabbirro | |||||
| 1.1 | noocyo badan | -- | 4H | 4H | 4H |
| 1.2 | jihada dusha sare | ° | <11-20>4±0.5 | <11-20>4±0.5 | <11-20>4±0.5 |
| 2: Halbeegga korontada | |||||
| 2.1 | dopant | -- | Nitrogen-ka nooca n-n | Nitrogen-ka nooca n-n | Nitrogen-ka nooca n-n |
| 2.2 | iska caabin | ohm · cm | 0.015~0.025 | 0.01~0.03 | NA |
| 3: Halbeegga farsamada | |||||
| 3.1 | dhexroor | mm | 200±0.2 | 200±0.2 | 200±0.2 |
| 3.2 | dhumucdiisuna waa | μm | 500±25 | 500±25 | 500±25 |
| 3.3 | Jihada qalooca | ° | [1- 100]±5 | [1- 100]±5 | [1- 100]±5 |
| 3.4 | Qoto dheer oo qoto dheer | mm | 1~1.5 | 1~1.5 | 1~1.5 |
| 3.5 | LTV | μm | ≤5 (10mm*10mm) | ≤5 (10mm*10mm) | ≤10 (10mm*10mm) |
| 3.6 | TV-ga | μm | ≤10 | ≤10 | ≤15 |
| 3.7 | Qaansada | μm | -25~25 | -45~45 | -65~65 |
| 3.8 | Duub | μm | ≤30 | ≤50 | ≤70 |
| 3.9 | AFM | nm | Ra≤0.2 | Ra≤0.2 | Ra≤0.2 |
| 4: Qaab-dhismeedka | |||||
| 4.1 | cufnaanta dhuumaha yaryar (micropipe) | ea/cm2 | ≤2 | ≤10 | ≤50 |
| 4.2 | maadada birta | atamka/cm2 | ≤1E11 | ≤1E11 | NA |
| 4.3 | TSD | ea/cm2 | ≤500 | ≤1000 | NA |
| 4.4 | BPD | ea/cm2 | ≤2000 | ≤5000 | NA |
| 4.5 | TED | ea/cm2 | ≤7000 | ≤10000 | NA |
| 5. Tayada hore | |||||
| 5.1 | hore | -- | Si | Si | Si |
| 5.2 | dhammaadka dusha sare | -- | CMP-ga Si-wajiga ah | CMP-ga Si-wajiga ah | CMP-ga Si-wajiga ah |
| 5.3 | walax yar | ea/wafer | ≤100 (cabbirka ≥0.3μm) | NA | NA |
| 5.4 | xoqid | ea/wafer | ≤5, Wadarta Dhererka ≤200mm | NA | NA |
| 5.5 | Gees jajabyo/qodad/dillaacyo/wasakh/fasax | -- | Midna ma jiro | Midna ma jiro | NA |
| 5.6 | Meelaha nooca polytype-ka ah | -- | Midna ma jiro | Aagga ≤10% | Aagga ≤30% |
| 5.7 | calaamadaynta hore | -- | Midna ma jiro | Midna ma jiro | Midna ma jiro |
| 6: Tayada dhabarka | |||||
| 6.1 | dhammaadka dambe | -- | Xildhibaan C-face ah | Xildhibaan C-face ah | Xildhibaan C-face ah |
| 6.2 | xoqid | mm | NA | NA | NA |
| 6.3 | Cilladaha dhabarka cidhifkooda jajabyo/qoto dheer | -- | Midna ma jiro | Midna ma jiro | NA |
| 6.4 | Qalafsanaanta dhabarka | nm | Ra≤5 | Ra≤5 | Ra≤5 |
| 6.5 | Calaamadaynta dambe | -- | Qaylo-dhaan | Qaylo-dhaan | Qaylo-dhaan |
| 7: gees | |||||
| 7.1 | gees | -- | Chamfer | Chamfer | Chamfer |
| 8: Xidhmo | |||||
| 8.1 | baakad | -- | Epi-ready oo leh faakiyuum baakad | Epi-ready oo leh faakiyuum baakad | Epi-ready oo leh faakiyuum baakad |
| 8.2 | baakad | -- | Wafer badan Baakadaha cajaladda | Wafer badan Baakadaha cajaladda | Wafer badan Baakadaha cajaladda |
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