8 inch Lithium Niobate Wafer LiNbO3 LN wafer
Macluumaad faahfaahsan
Dhexroorka | 200± 0.2mm |
flatness weyn | 57.5mm, Qalab |
Hanuuninta | 128Y- gooyay, X-jeex, Z-gooyay |
Dhumucda | 0.5 ± 0.025mm, 1.0 ± 0.025mm |
Dusha sare | DSP iyo SSP |
TTV | <5µm |
BOOSAA | ± (20µm ~ 40um) |
Warp | <= 20µm ~ 50µm |
LTV (5mmx5mm) | <1.5 um |
PLTV(<0.5um) | ≥98% (5mm*5mm) oo cidhifkeedu yahay 2mm laga saaray |
Ra | Ra<=5A |
Xoqo & Qod (S/D) | 20/10, 40/20, 60/40 |
Cidhif | La kulan SEMI M1.2@la GC800#. caadiga ah nooca C |
Tilmaamo gaar ah
Dhexroor: 8 inji (qiyaastii 200mm)
Dhumucda: Dhumucyada caadiga ah ee caadiga ah waxay u dhexeeyaan 0.5mm ilaa 1mm. Dhumucyada kale waxaa lagu habeyn karaa iyadoo loo eegayo shuruudo gaar ah
Hanuuninta Crystal: Hanuuninta crystal-ka ugu weyn waa 128Y-cut, Z-cut iyo hanuuninta crystal-X, iyo hanuuninta crystal kale ayaa la bixin karaa iyadoo ku xiran codsiga gaarka ah.
Faa'iidooyinka Cabbirka: 8-inch wafers carp serrata waxay leeyihiin faa'iidooyin dhowr ah oo cabbirro yar yar ah:
Aagga weyn: Marka loo eego 6-inch ama 4-inch wafers, 8-inch wafers waxay bixiyaan aag weyn oo dusha sare ah waxayna dejin karaan qalab badan iyo wareegyo isku dhafan, taas oo keentay kororka waxtarka wax soo saarka iyo dhalidda.
Cufnaanta sare: Adigoo isticmaalaya wafers 8-inch ah, qalabyo iyo qaybo badan ayaa lagu xaqiijin karaa isla aag isku mid ah, kordhinta isdhexgalka iyo cufnaanta qalabka, taas oo iyana kor u qaadaysa waxqabadka qalabka.
Joogteynta ka sii wanaagsan: Waferrada waaweyni waxay leeyihiin isku dheelitirnaan ka wanaagsan habka wax soo saarka, iyagoo ka caawinaya in la yareeyo isbeddelka habka wax soo saarka iyo hagaajinta isku-kalsoonaanta badeecada iyo joogtaynta.
Waferrada 8-inch L iyo LN waxay leeyihiin dhexroor isku mid ah waferrada silikoon ee caadiga ah waana ay fududahay in la xidho. Wax qabad sare oo ah "shaandhada SAW-gaaban" oo xamili kara xargaha soo noqnoqda ee sarreeya.