Muraayadaha indhaha ee JGS1, JGS2, iyo JGS3 ee la isku daray ee silica indhaha
Jaantus Faahfaahsan
Dulmar guud oo ku saabsan JGS1, JGS2, iyo JGS3 oo silica la isku daray
JGS1, JGS2, iyo JGS3 waa saddex darajo oo silica isku dhafan oo si sax ah loo farsameeyay, mid walbana loogu talagalay gobollo gaar ah oo ka mid ah spectrum-ka indhaha. Waxaa laga soo saaray silica saafi ah oo aad u sarreeya iyada oo loo marayo hababka dhalaalinta horumarsan, agabkani waxay muujinayaan caddeynta indhaha oo heer sare ah, ballaarinta kulaylka oo hooseysa, iyo xasilloonida kiimikada ee heerka sare ah.
-
JGS1- Silica isku dhafan oo heerka UV ah oo loogu talagalay gudbinta qoto dheer ee ultraviolet.
-
JGS2- Silica isku dhafan oo heer-optical ah si loogu arko codsiyada ku dhow-infrared.
-
JGS3- Silica isku dhafan oo heerka IR ah oo leh waxqabad la xoojiyay oo infrared ah.
Marka la doorto heerka saxda ah, injineeradu waxay gaari karaan gudbinta ugu fiican, adkeysiga, iyo xasilloonida nidaamyada indhaha ee adag.
Darajada JGS1, JGS2, iyo JGS3
JGS1 Silica Isku-dhafan - Heerka UV
Kala duwanaanshaha Gudbinta:185–2500 nm
Xoogga Ugu Weyn:Hufnaan sare oo ku jirta hirarka UV ee qoto dheer.
Silica isku dhafan ee JGS1 waxaa lagu soo saaraa iyadoo la adeegsanayo silica saafi ah oo macmal ah oo leh heerar wasakh ah oo si taxaddar leh loo xakameeyey. Waxay bixisaa waxqabad heer sare ah nidaamyada UV, iyadoo bixisa gudbin sare oo ka hooseysa 250 nm, iftiin otomaatig ah oo aad u hooseeya, iyo iska caabin xooggan oo ku wajahan qoraxda.
Tilmaamaha Waxqabadka ee JGS1:
-
Gudbinta >90% laga bilaabo 200 nm ilaa baaxadda la arki karo.
-
Heerkulka hydroxyl (OH) oo hooseeya si loo yareeyo nuugista UV.
-
Heerka dhaawaca sare ee laysarka oo ku habboon laysarka excimer.
-
Iftiin yar oo loogu talagalay cabbiraadda saxda ah ee UV.
Codsiyada Caadiga ah:
-
Optics-ka saadaasha sawir-qaadista.
-
Daaqadaha iyo muraayadaha laysarka ee Excimer (193 nm, 248 nm).
-
Qalabka cabbira UV-ga iyo qalabka sayniska.
-
METROGOLOGY-ga saxsan ee kormeerka UV-ga.
JGS2 Silica Isku-dhafan - Fasalka Indhaha
Kala duwanaanshaha Gudbinta:220–3500 nm
Xoogga Ugu Weyn:Waxqabadka indhaha oo dheellitiran laga bilaabo muuqaalka ilaa ku dhawaad-infrared.
JGS2 waxaa loogu talagalay nidaamyada indhaha ee ujeedo guud leh halkaas oo iftiinka muuqda iyo waxqabadka NIR ay muhiim yihiin. In kasta oo ay bixiso gudbinta UV ee dhexdhexaadka ah, qiimaheeda ugu weyn wuxuu ku jiraa isku mid ahaanshaha indhaha, qallooca hirarka ee hooseeya, iyo iska caabbinta kulaylka ee aadka u fiican.
Waxyaabaha ugu Muhiimsan ee Waxqabadka JGS2:
-
Gudbinta sare ee spectrum-ka VIS-NIR.
-
Awoodda UV hoos ugu dhacday ilaa ~ 220 nm codsiyada dabacsan.
-
Iska caabin aad u fiican oo ku saabsan shoogga kulaylka iyo cadaadiska farsamada.
-
Tusmada iftiinka oo isku mid ah oo leh birefringence yar.
Codsiyada Caadiga ah:
-
Optics-ka sawir-qaadista saxda ah.
-
Daaqadaha laysarka si loo helo hirarka muuqda iyo kuwa NIR.
-
Qaybiyeyaasha alwaaxa, shaandheeyayaasha, iyo biraha.
-
Qaybaha indhaha ee loogu talagalay mikroskoobka iyo nidaamyada saadaasha.
JGS3 Silica Isku-dhafan - IR
Fasal
Kala duwanaanshaha Gudbinta:260–3500 nm
Xoogga Ugu Weyn:Gudbinta infrared-ka ee la habeeyay oo leh nuugista OH oo hooseysa.
Silica isku dhafan ee JGS3 waxaa loo habeeyay inuu bixiyo hufnaan ugu badan oo infrared ah iyadoo la yareynayo heerka hydroxyl inta lagu jiro wax soo saarka. Tani waxay yareyneysaa heerka ugu sarreeya ee nuugista ee ~2.73 μm iyo ~4.27 μm, taasoo hoos u dhigi karta waxqabadka codsiyada IR.
Waxyaabaha ugu Muhiimsan ee Waxqabadka JGS3:
-
Gudbinta IR ee sareysa marka loo eego JGS1 iyo JGS2.
-
Khasaaraha ugu yar ee nuugista ee la xiriira OH.
-
Iska caabin heer sare ah oo kulka ah.
-
Xasilloonida muddada dheer ee jawiga heerkulka sare leh.
Codsiyada Caadiga ah:
-
Daaqadaha iyo godadka IR spectroscopy.
-
Sawir-qaadista kulaylka iyo dareemayaasha indhaha.
-
Daboolida ilaalinta IR-ga ee jawi adag.
-
Dekedaha daawashada warshadaha ee hababka heerkulka sare leh.
Xogta Muhiimka ah ee Isbarbardhigga ee JGS1, JGS2, iyo JGS3
| Shay | JGS1 | JGS2 | JGS3 |
| Cabbirka ugu Badan | <Φ200mm | <Φ300mm | <Φ200mm |
| Kala duwanaanshaha Gudbinta (Saamaynta gudbinta dhexdhexaadka ah) | 0.17~2.10um (Tavg>90%) | 0.26~2.10um (Tavg>85%) | 0.185~3.50um (Tavg>85%) |
| OH- Mawduuca | 1200 ppm | 150 ppm | 5 ppm |
| Iftiinka (sida 254nm) | Dhab ahaantii Bilaash ah | VB xooggan | VB xooggan |
| Waxyaabaha Nadaafadda ah | 5 ppm | 20-40 ppm | 40-50 ppm |
| Joogtada ah ee Birfringence | 2-4 nm/cm | 4-6 nm/cm | 4-10 nm/cm |
| Habka Dhalmada | CVD-ga Synthetic-ga ah | Dhalaalidda Oxygen-hydrogen | Dhalaal koronto |
| Codsiyada | Substrate-ka laysarka: Daaqadda, muraayadda, prism-ka, muraayadda... | Semiconductor iyo daaqad heerkul sare leh | IR & UV substrate-ka |
Su'aalaha Badiya La Weydiiyo - JGS1, JGS2, iyo JGS3 Silica Isku-dhafan
S1: Waa maxay faraqa ugu weyn ee u dhexeeya JGS1, JGS2, iyo JGS3?
A:
-
JGS1- Silica isku dhafan oo heerka UV ah oo leh gudbin heer sare ah oo ka timid 185 nm, oo ku habboon indhaha UV-qoto dheer iyo laser-ka excimer.
-
JGS2– Silica isku dhafan oo heer-indhaha ah oo loogu talagalay codsiyada ku dhow-infrared (220-3500 nm), oo ku habboon indhaha guud ahaan.
-
JGS3– Silica isku dhafan oo heerka IR ah oo loogu talagalay infrared (260–3500 nm) oo leh heerarka nuugista OH oo yaraaday.
S2: Fasalkee ayaan u dooran karaa codsigayga?
A:
-
DooroJGS1loogu talagalay lithography UV, spectroscopy UV, ama nidaamyada laysarka 193 nm/248 nm.
-
DooroJGS2qalabka sawir-qaadista la arki karo/NIR, muraayadaha indhaha ee laysarka, iyo aaladaha cabbirka.
-
DooroJGS3loogu talagalay IR spectroscopy, sawir-qaadista kulaylka, ama daaqadaha daawashada heerkulka sare.
S3: Dhammaan darajooyinka JGS ma leeyihiin awood jireed oo isku mid ah?
A:Haa. JGS1, JGS2, iyo JGS3 waxay wadaagaan sifooyin farsamo oo isku mid ah - cufnaanta, adkaanta, iyo ballaarinta kulaylka - sababtoo ah dhammaantood waxaa laga sameeyay silica isku dhafan oo saafi ah. Farqiga ugu weyn waa indhaha.
S4: JGS1, JGS2, iyo JGS3 ma u adkaystaa dhaawaca laysarka?
A:Haa. Dhammaan darajooyinka waxay leeyihiin heer sare oo dhaawac laysar ah (>20 J/cm² at 1064 nm, 10 ns garaac). Laysarka UV,JGS1waxay bixisaa iska caabbinta ugu sarreysa ee qorraxda iyo burburka dusha sare.
Nagu Saabsan
XKH waxay ku takhasustay horumarinta tiknoolajiyadda sare, wax soo saarka, iyo iibinta muraayadaha indhaha ee gaarka ah iyo agabka cusub ee kiristaalka. Badeecadahayagu waxay u adeegaan qalabka elektaroonigga ah ee indhaha, qalabka elektaroonigga ah ee macaamiisha, iyo militariga. Waxaan bixinaa qaybaha indhaha ee Sapphire, daboolka muraayadaha taleefanka gacanta, dhoobada, LT, Silicon Carbide SIC, Quartz, iyo wafers kiristaal semiconductor ah. Iyada oo leh khibrad xirfadeed iyo qalab casri ah, waxaan ku fiicanahay habaynta wax soo saarka aan caadiga ahayn, annagoo higsanayna inaan noqono shirkad hormuud u ah qalabka optoelectronic-ka ee tiknoolajiyada sare.












