Wafers Quartz ah oo Nadiif ah oo loogu talagalay Semiconductor, Codsiyada Indhaha ee Photonics 2″4″6″8″12″
Jaantus Faahfaahsan
Guudmarka Muraayadda Quartz
Wafer-ka Quartz wuxuu laf-dhabar u yahay aaladaha casriga ah ee aan la tirin karin ee dhaqaajiya adduunka dijitaalka ah ee maanta. Laga bilaabo hagitaanka taleefankaaga casriga ah ilaa laf-dhabarta saldhigyada 5G, quartz si aamusnaan ah ayuu u bixiyaa xasilloonida, daahirnimada, iyo saxnaanta looga baahan yahay elektaroonigga iyo sawir-qaadista waxqabadka sare leh. Hadday tahay taageeridda wareegga dabacsan, awoodsiinta dareemayaasha MEMS, ama sameynta aasaaska xisaabinta quantum, astaamaha gaarka ah ee quartz waxay ka dhigayaan mid aan lagama maarmaan u ah warshadaha oo dhan.
"Silica Fused" ama "Fused Quartz" oo ah wejiga aan qaab lahayn ee quartz (SiO2). Marka la barbardhigo galaaska borosilicate, silica fused ma laha wax lagu daro; sidaas darteed waxay ku jirtaa qaabkeeda saafiga ah, SiO2. Silica fused waxay leedahay gudbin sare oo ku jirta infrared iyo ultraviolet spectrum marka la barbar dhigo galaaska caadiga ah. Silica fused waxaa lagu soo saaraa dhalaalid iyo dib-u-xoojin ultrapure SiO2. Silica fused synthetic dhinaca kale waxaa laga sameeyaa waxyaabo kiimiko ah oo hodan ku ah silicon sida SiCl4 kuwaas oo gaas lagu shubo ka dibna lagu oksaydhiyo jawi H2 + O2 ah. Boodhka SiO2 ee kiiskan lagu sameeyay waxaa lagu dhejiyaa silica substrate. Baloogyada silica fused waxaa loo gooyaa wafers ka dibna wafers-ka ayaa ugu dambeyntii la safeeyaa.
Sifooyinka Muhiimka ah iyo Faa'iidooyinka Quartz Glass Wafer
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Nadiifnimo Aad u Sareysa (≥99.99% SiO2)
Ku habboon hababka semiconductor-ka iyo photonics-ka ee aadka u nadiifsan halkaas oo wasakhowga walxaha ay tahay in la yareeyo. -
Kala duwanaansho ballaaran oo kulka ah
Waxay ilaalisaa hufnaanta qaab-dhismeedka laga bilaabo heerkulka cryogenic ilaa ka badan 1100°C iyada oo aan la qalloocin ama la burburin. -
Gudbinta UV iyo IR oo heer sare ah
Waxay bixisaa caddeyn muuqaal oo aad u fiican oo ka timaadda ultraviolet qoto dheer (DUV) iyada oo loo marayo ku dhawaad infrared (NIR), taasoo taageerta codsiyada indhaha ee saxda ah. -
Isku-xidhka Ballaarinta Kulaylka Hoose
Waxay xoojisaa xasilloonida cabbirka marka heerkulku isbeddelo, waxayna yareysaa walbahaarka iyo hagaajinta isku halaynta habka. -
Iska caabinta Kiimikada Sare
Ku habboon asiidhyada, alkalisyada, iyo dareerayaasha badankood - taasoo ka dhigaysa mid ku habboon deegaannada kiimikada u nugul. -
Dabacsanaanta Dhammaadka Dusha Sare
Waxaa laga heli karaa dhammaystir siman, hal dhinac ah ama laba dhinac ah oo la safeeyey, oo la jaan qaadaya shuruudaha photonics iyo MEMS.
Habka Wax Soo Saarka ee Quartz Glass Wafer
Wafers-ka quartz ee la isku daray waxaa lagu soo saaraa taxane tallaabooyin la xakameeyey oo sax ah:
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Xulashada Walxaha Cayriin
Xulashada quartz dabiici ah oo saafi ah ama ilo SiO₂ oo macmal ah. -
Dhalaalidda iyo Isku-dhafka
Quartz wuxuu ku dhalaalaa ~ 2000°C foornada korontada iyadoo la adeegsanayo jawi la xakameeyey si looga saaro waxyaabaha ku jira iyo xumbo. -
Samaynta Block
Silica dhalaalay waxaa loo qaboojiyaa baloogyo adag ama qaybo. -
Gooynta Wafer-ka
Miinshaar dheeman ama silig ah ayaa loo isticmaalaa in lagu jaro burooyinka si loo sameeyo meelo aan lahayn wafer. -
Daba-dhaqidda & Nadiifinta
Labada dusha sare waa la siman yahay oo la safeeyey si ay u buuxiyaan shuruudaha saxda ah ee indhaha, dhumucda, iyo qallafsanaanta. -
Nadiifinta iyo Kormeerka
Waferada waxaa lagu nadiifiyaa qolalka nadiifinta ee ISO Class 100/1000 waxaana lagu sameeyaa kormeer adag si loo ogaado cilladaha iyo waafaqsanaanta cabbirka.
Sifooyinka Quartz Glass Wafer
| qeexitaan gaar ah | cutub | 4" | 6" | 8" | 10" | 12" |
|---|---|---|---|---|---|---|
| Dhexroor / cabbir (ama afar geesle) | mm | 100 | 150 | 200 | 250 | 300 |
| Dulqaadka (±) | mm | 0.2 | 0.2 | 0.2 | 0.2 | 0.2 |
| Dhumucda | mm | 0.10 ama ka badan | 0.30 ama ka badan | 0.40 ama ka badan | 0.50 ama ka badan | 0.50 ama ka badan |
| Guri tixraac ah oo aasaasi ah | mm | 32.5 | 57.5 | Nus-qolof | Nus-qolof | Nus-qolof |
| LTV (5mm × 5mm) | μm | < 0.5 | < 0.5 | < 0.5 | < 0.5 | < 0.5 |
| TV-ga | μm | < 2 | < 3 | < 3 | < 5 | < 5 |
| Qaansada | μm | ±20 | ±30 | ±40 | ±40 | ±40 |
| Duub | μm | ≤ 30 | ≤ 40 | ≤ 50 | ≤ 50 | ≤ 50 |
| PLTV (5mm×5mm) < 0.4μm | % | ≥95% | ≥95% | ≥95% | ≥95% | ≥95% |
| Wareegga Geesaha | mm | U hoggaansan Heerka SEMI M1.2 / tixraac IEC62276 | ||||
| Nooca Dusha Sare | Dhinac Hal La Safeeyey / Dhinac Laba Jibaaran La Safeeyey | |||||
| Dhinaca la safeeyey ee Ra | nm | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 |
| Shuruudaha Dhinaca Dambe | μm | guud ahaan 0.2-0.7 ama la habeeyey | ||||
Quartz iyo Agabyada kale ee Daahfuran
| Hantida | Muraayadda Quartz | Muraayadda Borosilicate | Safayr | Muraayadda Caadiga ah |
|---|---|---|---|---|
| Heerkulka ugu Sareeya ee Hawlgalka | ~1100°C | ~500°C | ~2000°C | ~200°C |
| Gudbinta UV | Aad u fiican (JGS1) | Liita | Wanaagsan | Aad u liita |
| Iska caabinta Kiimikada | Aad u fiican | Dhexdhexaad ah | Aad u fiican | Liita |
| Daahirnimo | Aad u sarreeya | Hoos ilaa dhexdhexaad | Sare | Hoose |
| Ballaarinta Kulaylka | Aad u hooseeya | Dhexdhexaad ah | Hoose | Sare |
| Qiimaha | Dhexdhexaad ilaa sare | Hoose | Sare | Aad u hooseeya |
Su'aalaha Inta Badan La Isweydiiyo ee Quartz Glass Wafer
S1: Waa maxay faraqa u dhexeeya quartz la shiiday iyo silica la shiiday?
In kasta oo labaduba ay yihiin qaabab aan qaab lahayn oo SiO₂ ah, quartz-ka la isku daray wuxuu caadi ahaan ka soo jeedaa ilo quartz dabiici ah, halka silica la isku daray si macmal ah loo soo saaro. Si shaqeyneed, waxay bixiyaan waxqabad la mid ah, laakiin silica la isku daray waxay yeelan kartaa daahirnimo iyo isku midnimo yar.
S2: Ma loo isticmaali karaa wafer-ka quartz-ka ee la isku daray jawi faaruq badan leh?
Haa. Sababtoo ah sifooyinkooda gaaska oo hooseeya iyo iska caabbinta kulaylka oo sareysa, wafer-ka quartz ee la shiiday ayaa aad ugu fiican nidaamyada faakiyuumka iyo codsiyada hawada sare.
S3: Ma yihiin buskudyadan ku habboon isticmaalka laysarka qoto dheer ee UV-ga?
Dabcan. Quartz-ka la isku daray wuxuu leeyahay gudbin sare ilaa ~ 185 nm, taasoo ka dhigaysa mid ku habboon muraayadaha indhaha ee DUV, maaskaro lithography ah, iyo nidaamyada laysarka excimer.
S4: Ma taageertaa sameynta buskudka gaarka ah?
Haa. Waxaan bixinaa habayn buuxda oo ay ku jiraan dhexroorka, dhumucda, tayada dusha sare, fidsan/qalabka, iyo qaabaynta laysarka, iyadoo lagu salaynayo shuruudahaaga gaarka ah ee codsiga.
Nagu Saabsan
XKH waxay ku takhasustay horumarinta tiknoolajiyadda sare, wax soo saarka, iyo iibinta muraayadaha indhaha ee gaarka ah iyo agabka cusub ee kiristaalka. Badeecadahayagu waxay u adeegaan qalabka elektaroonigga ah ee indhaha, qalabka elektaroonigga ah ee macaamiisha, iyo militariga. Waxaan bixinaa qaybaha indhaha ee Sapphire, daboolka muraayadaha taleefanka gacanta, dhoobada, LT, Silicon Carbide SIC, Quartz, iyo wafers kiristaal semiconductor ah. Iyada oo leh khibrad xirfadeed iyo qalab casri ah, waxaan ku fiicanahay habaynta wax soo saarka aan caadiga ahayn, annagoo higsanayna inaan noqono shirkad hormuud u ah qalabka optoelectronic-ka ee tiknoolajiyada sare.











